针对目前铸锭产品的品质效果缺乏有效及时的在线测试方法, 本文提出了多晶硅铸锭生产气体在线检测系统。该系统通过对铸锭生产过程中排出的工艺性尾气——氩气进行干泵取样、增压测试、实时分析等技术, 实现了在线式自动取样实时分析, 超限报警的功能, 可实时根据生产过程中炉腔内气氛的变化, 提早发现铸锭炉的故障和异常, 减少异常产品的出产率。通过后续电池数据的支撑, 可确定设备漏水和漏气的极限值,达到精细化调控硅锭质量、危险预警的效果, 为铸锭氩气回收系统做好预研的准备。

In view of the lack of effective and timely online testing methods for the current quality effects of ingot products, this paper proposes an on-line detection system for the production gas of polycrystalline silicon ingots. The system realizes the online automatic sampling real-time analysis and the function of over-limit alarm, which can be based on real-time automatic sampling and real-time analysis through dry pump sampling, pressurization test, and real-time analysis of the argon gas, which is an exhaust of the technical exhaust gas in the process of ingot production. Changes in the atmosphere in the furnace cavity during the production process, early detection of faults and abnormalities in the ingot furnace reduced the yield of abnormal products. Through the support of the follow-up battery data, the limit values of water leakage and gas leakage of the equipment can be determined to achieve the effect of fine-tuning the quality of silicon ingots and early warning of danger, and prepare for the pre-research for the ingot argon gas recovery system.