光电工程, 2020, 47 (8): 200205, 网络出版: 2020-10-28
X射线反射镜研制技术的现状和发展
A review on the fabrication technology of X-ray reflector
摘要
本文总结了当前同步辐射 X射线反射镜光学制造技术的需求背景、发展现状以及未来方向。同步辐射光源是国家重大科学装置, 作为同步辐射光源重要光学元件的 X射线反射镜, 直接决定着光学调制品质。短波长掠入射的特殊应用场景, 使 X射线反射镜有着更为特殊且高精度的面形要求, 其加工与检测技术长期为国外所垄断, 国内发展较为缓慢, 面对国内未来同步辐射装置的建设需求, 我国亟需打破这一现状。
Abstract
This article reviews on the fabrication advancement of X-ray reflect mirror fabrication in terms of technical requirements, fabrication and metrology development. Synchrotron radiation source, as a revolutionary light source, provides one of the most high-performance X-ray for scientific research, where reflect mirror plays an essential role in X-ray beam focusing. The short wavelength of X-ray demands reflecting photons only at a grazing angle of inci-dence on the extremely high-precision and smooth surface. Fabrication of such mirrors requires highly specialized equipment and technology that only a few foreign optic manufacturers possess, whereas manufacturers in China is laggard in this area. It is imperative to develop fabrication capability domestically as two synchrotron radiation facili-ties are under construction and several more projects are about to launch in the near future in China.
李明, 吴介立, 吴永前, 徐燕, 张东霓, 洪振, 杨福桂, 万勇建. X射线反射镜研制技术的现状和发展[J]. 光电工程, 2020, 47(8): 200205. Li Ming, Wu Jieli, Wu Yongqian, Xu Yan, Zhang Dongni, Hong Zhen, Yang Fugui, Wan Yongjian. A review on the fabrication technology of X-ray reflector[J]. Opto-Electronic Engineering, 2020, 47(8): 200205.