图像式角位移测量装置中, 光栅的安装偏心标定结果直接影响着角位移测量的精度。为此, 本文设计了一种用于调试图像式角位移测量装置光栅偏心度的系统。首先, 根据图像式角位移测量机理, 提出了基于线阵图像传感器的标定光栅偏心度监测原理; 然后, 在图像传感器上建立了偏心调试监测信号的模型, 并提出存在偏心时偏心监测信号的变化机理; 最后, 对某型号角位移测量装置进行了实验, 并给出了调试建议。实验表明, 经过调节误差均方差由1 017″降低到12.8″。本文设计的偏心监测系统能够实现对标定光栅的高精度安装调试, 提高了图像式角位移测量装置的批量生产效率。

In an image-based angular displacement measuring device, the installation eccentricity of the calibration grating directly affects the accuracy of angular displacement measurements. In this paper, a system for debugging the eccentricity of the grating in the angular displacement measuring device was designed. First, according to the mechanism of image-based angular displacement measurement, a method for monitoring the eccentricity of the calibration grating was proposed utilizing a linear array image sensor. A model of the eccentricity monitoring signal on the image sensor was subsequently established, and a mechanism for changing the signal was determined. Finally, an experiment on a certain type of angular displacement measurement device was carried out and debugging suggestions were provided. The experiment demonstrates that the adjustment reduces the root mean square error from 1 017″ to 12.8″.The eccentricity monitoring system designed in this paper can achieve installation and debugging of the calibration grating with high precision, and improve the efficiency of mass production of image-based angular displacement measurement devices.