半导体光电, 2020, 41 (5): 618, 网络出版: 2021-01-19
大功率半导体激光器抗腔面灾变性光学损伤技术综述
Review on The Methods of Preventing Catastrophic Optical Mirror Damage in High-power Diode Lasers
大功率半导体激光器 腔面灾变性光学损伤 输出功率 可靠性 high-power diode lasers catastrophic optical mirror damage output power reliability
摘要
激光器腔面灾变性光学损伤对大功率半导体激光器的最大输出功率和可靠性有很大的负面影响, 是激光器突然失效的主要机制。如何克服腔面灾变性光学损伤, 从而获得高性能的大功率半导体激光器成为重要的研究课题。文章首先对腔面灾变性光学损伤的研究历程进行了简要介绍, 随后论述了腔面灾变损伤的物理机制及热动力学过程, 最后从技术原理、方法、优缺点、改进方法、研究进展及应用现状的角度, 逐一对各种抑制腔面灾变损伤的方法进行了归纳和总结。
Abstract
The catastrophic optical mirror damage has a significantly negative effect on the maximum output power and reliability of the high-power diode laser, which is the main mechanism of its sudden failure. How to overcome the catastrophic optical mirror damage of the cavity surface to obtain the high-performance diode lasers has become an important research topic at home and abroad. Firstly, the research process of catastrophic optical mirror damage is briefly introduced in this paper. Then the mechanisms and the thermal kinetics of the catastrophic optical mirror damage are discussed. Finally, various surface passivation technologies are summarized one by one from the perspectives of technical principles, methods, advantages and disadvantages and the improved methods, research progress and application status.
宋悦, 宁永强, 秦莉, 陈泳屹, 张金龙, 张俊, 王立军. 大功率半导体激光器抗腔面灾变性光学损伤技术综述[J]. 半导体光电, 2020, 41(5): 618. SONG Yue, NING Yongqiang, QIN Li, CHEN Yongyi, ZHANG Jinlong, ZHANG Jun, WANG Lijun. Review on The Methods of Preventing Catastrophic Optical Mirror Damage in High-power Diode Lasers[J]. Semiconductor Optoelectronics, 2020, 41(5): 618.