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12 μm像元间距1280×1024碲镉汞中波红外焦平面探测器的制备及性能研究

Study on Preparation and Performance of 1280×1024@12 μm HgCdTe MWIR Focal Plane Detectors

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摘要

武汉高德红外股份有限公司成功研制了像元尺寸为12 m×12 m的1280×1024大面阵碲镉汞中波红外焦平面探测器。在优化提升材料性能的基础上,突破了小像元钝化开孔、高密度小尺寸铟柱制备以及高精度大面阵倒焊等关键技术,成功制备出了1280×1024@12 m碲镉汞中波红外焦平面芯片及组件。其盲元率小于0.5%,响应率非均匀性小于5%。F2探测器的平均噪声等效温差(Noise Equivalent Temperature Difference, NETD)为15 mK,平均峰值探测率为6×1011 cm·Hz1/2·W-1。F4探测器的平均NETD为18.5 mK,平均峰值探测率为1.2×1012 cm·Hz1/2·W-1。另外还提出了一种不稳定像元测试方法,即通过分析两点校正后的成像数据,并利用模块中值和空域噪声的比较,完成对红外图像中不稳定像元的检测和校正。结果表明,校正后的红外成像画质良好,在120 K时器件性能无明显降低。

Abstract

Wuhan Guide Infrared Co., Ltd. has successfully developed a 1280×1024 large.format HgCdTe mid.wave infrared focal plane detector with a pixel size of 12 m×12 m. On the basis of optimizing and improving the performance of materials, the key technologies such as passivation of small pixel, preparation of high.density and small.size indium column, and high.precision and large area array reverse welding have been broken through. The 1280×1024@12m mid.wave HgCdTe infrared focal plane chips and components were successfully fabricated. The default pixel rate is less than 0.5%, and the non.uniformity of response rate is less than 5%. The average noise equivalent temperature difference (NETD)of F2 detector is 15 mK, and the average peak detection rate is 6×10 11 cm·Hz 1/2·W -1. The average NETD of F4 detector is 18.5 mK, and the average peak detection rate is 1.2×10 12 cm·Hz 1/2·W -1. In addition, a method for testing unstable pixels is proposed. By analyzing the image data after two.point correction and comparing the median value of the module with the spatial noise, the detection and correction of unstable pixels in infrared image are completed. After correction, the infrared imaging quality is good, and the performance of the device does not decrease obviously at 120 K.

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中图分类号:TN125

DOI:10.3969/j.issn.1672-8785.2020.03.002

所属栏目:研究论文

基金项目:国家自然科学青年基金(51602015)

收稿日期:2020-03-04

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刘伟华:武汉高德红外股份有限公司,湖北武汉430205
刘帆:武汉高德红外股份有限公司,湖北武汉430205
吴正虎:武汉高德红外股份有限公司,湖北武汉430205
姚柏文:武汉高德红外股份有限公司,湖北武汉430205
汪良衡:武汉高德红外股份有限公司,湖北武汉430205
张冰洁:武汉高德红外股份有限公司,湖北武汉430205
刘道进:武汉高德红外股份有限公司,湖北武汉430205
周文洪:武汉高德红外股份有限公司,湖北武汉430205

联系人作者:刘伟华(hua294@163.com)

备注:刘伟华(1983-),男,河南安阳人,硕士,主要从事制冷型红外探测器研发工作。E.mail:hua294@163.com

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引用该论文

LIU Wei.hua,LIU Fan,WU Zheng.hu,YAO Bai.wen,WANG Liang.heng,ZHANG Bing.jie,LIU Dao.jin,ZHOU Wen.hong. Study on Preparation and Performance of 1280×1024@12 μm HgCdTe MWIR Focal Plane Detectors[J]. INFRARED, 2020, 41(3): 9-15

刘伟华,刘帆,吴正虎,姚柏文,汪良衡,张冰洁,刘道进,周文洪. 12 μm像元间距1280×1024碲镉汞中波红外焦平面探测器的制备及性能研究[J]. 红外, 2020, 41(3): 9-15

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