飞秒激光在材料表面诱导产生亚波长周期结构不仅可以改变材料表面的物化性质,而且具有无掩模制作和一步成型等优点,在多个领域具有广阔的应用前景。然而,目前结构形成存在排列规整性差、形状单一、制备效率低等问题。为此,综述了单束飞秒激光在金属表面高效制备规整性一维亚波长周期结构的研究进展,提出了利用时间延迟多束飞秒激光对金属和半导体表面一维亚波长周期结构产生特征(包括规整性、空间周期、排列方向等)进行灵活调控的新方法,成功实现了形貌特征分别为圆包、三角形、菱形、椭圆状、条纹-纳米颗粒复合等多种二维亚波长周期结构的制备,发现了表面结构调控产生过程中出现的超快物理新现象,阐明了时间延迟飞秒激光束与材料作用过程之间的瞬态关联作用。

Femtosecond laser-induced periodic surface structures not only have the capability in modifying the physicochemical properties of the material interfaces, but also possess the features of mask-free and one-step processing, which promise wide applications in multidisciplinary fields. Currently, however, there are some challenges in this technology, such as the poor structural regularity, dimensional inflexibility and low production efficiency. This paper firstly reviews progresses in fabricating highly regular one-dimensional subwavelength periodic structures with the improved efficiency on metal films, under irradiation of the single-beam femtosecond laser pulses. Then we introduces novel methods to control one-dimensional structure features (including the regularity, periodicity and orientation) on both metals and semiconductors, by utilizing the collinear propagation of double femtosecond laser beams associated with certain temporal delays. Two-dimensional arrays of the subwavelength periodic structures are successfully achieved with different geometric profiles such as the triangle, rhombus, elliptical rod, and ripple-particle hybridization. Some ultrafast physical phenomena are discovered during the control formation of the periodic surface structures. The transient correlation effects between ultrafast dynamic processes of laser-material are elucidated for the incidence of temporally-delayed pulses.