中国激光, 2020, 47 (5): 0502009, 网络出版: 2020-05-12
玻璃表面嵌入式亚微米金属线的制备 下载: 1133次
Fabrication of Embedded Submicron Metal Lines on Glass Surfaces
激光技术 飞秒激光烧蚀 石英玻璃 阈值效应 连续流化学镀 亚微米金属线 laser technique femtosecond laser ablation fused silica threshold effect continuous-flow electroless plating submicron metal wires
摘要
提出了一种在玻璃表面制备嵌入式亚微米金属线的方法。首先利用飞秒激光直写技术在玻璃表面烧蚀出亚微米线宽的凹槽,然后采用连续流化学镀工艺在样品表面沉积金属薄膜,再经过热处理和机械抛光,可实现玻璃表面嵌入式亚微米线宽金属结构的可控制备。将飞秒激光烧蚀的阈值效应与连续流化学镀相结合,可制备出最小线宽约为0.66 μm的金属银线。四探针法测试结果表明,制备的亚微米金属银线具有良好的导电性,其电阻率约为体积银电阻率的1.2倍。
Abstract
In this study, a method for fabricating embedded submicron metal wires on glass surfaces is demonstrated. First, grooves with submicron linewidths were ablated on glass surfaces using femtosecond laser direct writing. Then, metal films were deposited on the laser-treated glass surfaces using continuous-flow electroless plating. Subsequently, the plated samples were annealed by a thermal treatment process. Finally, an additional mechanical polishing process enabled the controllable fabrication of the embedded submicron metal wires on the glass surfaces. By combining the threshold effects of femtosecond laser ablation and continuous-flow electroless plating, metallic silver lines with a minimum linewidth of approximately 0.66 μm can be prepared. Moreover, four-probe measurement results indicate that the resistivity of the fabricated submicron metal wires is only approximately 1.2 higher than that of bulk silver, thus indicating their good electrical conductivity.
余浩锋, 徐剑, 张傲东, 程亚. 玻璃表面嵌入式亚微米金属线的制备[J]. 中国激光, 2020, 47(5): 0502009. Haofeng Yu, Jian Xu, Aodong Zhang, Ya Cheng. Fabrication of Embedded Submicron Metal Lines on Glass Surfaces[J]. Chinese Journal of Lasers, 2020, 47(5): 0502009.