在能量为（0.5+0.55）MeV和剂量为（1.0+2.0）×10¹⁶ ions/cm²的条件下，通过氢离子注入制备了掺Yb³⁺磷酸盐玻璃波导，并研究了该波导在近红外波段的特性.棱镜耦合法测量的离子注入波导的导模的有效折射率与反射计算法计算的有效折射率基本吻合.通过模拟辐照引起的空位分布，探讨了离子注入平面波导的形成理论.利用FD-BPM对波导中的传播模式进行了模拟，结果表明高能量的氢离子注入掺Yb³⁺磷酸盐玻璃能够制备出近红外波导结构.

The Yb³⁺-doped phosphate glass waveguides by the hydrogen-ion implantation under the condition of energies of (0.5+0.55) MeV and doses of (1.0+2.0)×10¹⁶ ions/cm² were fabricated, and characteristics of the waveguide were studied in the near-infrared band. The change of refractive index after the implantation was measured by the prism coupling method, which corresponded well with the calculated effective refractive index by the reflectivity calculation method. The formation theory of the ion-implanted planar waveguides was discussed through simulating the vacancy distribution induced by the irradiation. The propagation mode of light in the waveguide was simulated by using the FD-BPM, which suggested that the near-infrared waveguide structure could be fabricated by irradiating the Yb³⁺-doped phosphate glass with the energetic hydrogen ions.