首页 > 论文 > 光学学报 > 40卷 > 8期(pp:0822001--1)

自准校正单透镜检验凸非球面的方法研究

Convex Aspheric Surface Testing Method Using an Autocollimation Lens

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

针对凸非球面大口径、大相对孔径、全口径检验难的问题,提出了一种利用自准校正单透镜检验凸非球面的方法。该方法通过在单透镜的凸面镀半反半透膜构成自准校正透镜,校正非球面的球差,从而实现大口径凸非球面的全口径检验。依据三级像差理论,推导了初始结构参数计算公式,介绍了检验光学系统的设计方法;对口径为240.62 mm、相对孔径为0.48的凸扁球面光学检验系统进行了模拟设计。系统优化后的残余波像差峰谷(PV)值为0.00025λ,均方根(RMS)值为0.0001λ(λ=632.8 nm)。将该方法用于工程项目中口径为287 mm、相对孔径为0.74的凸双曲面反射镜检验中,测得镜面RMS为0.021λ,验证了该方法的可行性。最后对该方法的适用性以及像差校正能力进行分析。研究结果表明:该方法可以实现任意偏心率凸非球面的全口径检验,在大口径、大相对孔径凸非球面全口径检验时具有较大优势。

Abstract

Testing the full-aperture of convex aspheric surface with large aperture and large relative aperture is challenging. To solve this problem, we propose a convex aspheric surface testing method using an autocollimation lens in this study. In the proposed method, a self-aligning lens is formed by plating a semi-inverted semi-permeable film onto the convex surface of a single lens to correct the spherical aberration of the aspheric surface, enabling the full-aperture testing of the large-aperture convex aspheric surface. We derive initial structure parameters using the third-order aberration theory, and then introduce the design method in detail. We design and simulate an optical system to test a convex oblate spheroid with an aperture of 240.62 mm and relative aperture of 0.48, and then perform a tolerance analysis of the system. The peak valley (PV) value of the residual aberration of the optimized system is 0.00025λ and the root-mean-square (RMS) error is 0.0001λ. The proposed method is also applied in testing a practical convex hyperboloid with an aperture of 287 mm and relative aperture of 0.74. We obtain an RMS of 0.021λ, which verifies the feasibility of the proposed method. Finally, the applicability of this method and the aberration correction ability are analyzed. In summary, the proposed method can be used to test the full-aperture of any eccentricity convex aspheric surface, and it has great advantages in testing full-aperture of convex aspheric surface with large aperture and large relative aperture.

广告组1 - 空间光调制器+DMD
补充资料

中图分类号:O435.2

DOI:10.3788/AOS202040.0822001

所属栏目:光学设计与制造

收稿日期:2019-11-18

修改稿日期:2019-12-30

网络出版日期:2020-04-01

作者单位    点击查看

戚丽丽:中国科学院上海技术物理研究所, 上海 200080
郑列华:中国科学院上海技术物理研究所, 上海 200080
叶璐:中国科学院上海技术物理研究所, 上海 200080
张金平:中国科学院上海技术物理研究所, 上海 200080

联系人作者:张金平(Qiliisme@126.com)

【1】Burge J H, Benjamin S, Caywood D. Fabrication and testing of 1.4 m convex off-axis aspheric optical surfaces [J]. Proceedings of SPIE. 2009, 7426: 692-697.

【2】Horst R T, Stuik R. Manufacturing and testing of a convex aspherical mirror for ASSIST [J]. Proceedings of SPIE. 2012, 8450: 84504X.

【3】Pan J H. The design, manufacture and test of the aspherical optical surfaces[M]. Suzhou: Soochow University Press, 2004, 51-61.
潘君骅. 光学非球面的设计、加工与检验[M]. 苏州: 苏州大学出版社, 2004, 51-61.

【4】Optical shop testing[M]. Yang L: Wu F, et al, Transl. 3rd ed. Beijing: Press of Mechanical Industry, 2012, 340-347.
Malacara D, Malacara D. 光学车间检测[M]. 杨力: 伍凡, 等, 译. 3版. 北京:机械工业出版社, 2012, 340-347.

【5】Д.Т., [M]. Пуряев. Методы контроля оптических асферических поверхностей. Yang Li: Transl. Beijing: Science Press, 1982, 243-244.
Д.Т., [M]. 普利亚耶夫·光学非球面检验. 杨力: 译. 北京: 科学出版社, 1982, 243-244.

【6】Hao P M. Design of auxiliary optical system for aspheric surface testing[M]. Beijing: Science Press, 2017, 30-46.
郝沛明. 非球面检验的辅助光学系统设计[M]. 北京: 科学出版社, 2017, 30-46.

【7】Ma J, Zhu Z. Testing convex aspherical surfaces with optimized modified Hindle arrangement [J]. Infrared and Laser Engineering. 2011, 40(2): 277-281.
马杰, 朱政. 改进的Hindle方法检测凸非球面的研究 [J]. 红外与激光工程. 2011, 40(2): 277-281.

【8】Wang P, Zhao W C, Hu M Y, et al. Hindle testing of the off-axis convex ashpere surface [J]. Optics and Precision Engineering. 2002, 10(2): 139-142.
王鹏, 赵文才, 胡明勇, 等. 离轴凸非球面的Hindle检测 [J]. 光学精密工程. 2002, 10(2): 139-142.

【9】Guo P J, Yu J Ch. Design and certification of a null corrector to test hyperboloid convex mirror [J]. Proceedings of SPIE. 2006, 6150: 259-263.

【10】Xue D L, Zhang Z Y, Zheng L G, et al. Testing methods for large aperture convex SiC asphere mirror [J]. Optics and Precision Engineering. 2008, 16(12): 2491-2496.
薛栋林, 张忠玉, 郑立功, 等. 大口径碳化硅材料凸非球面反射镜的检验 [J]. 光学精密工程. 2008, 16(12): 2491-2496.

【11】Song Q, Yang B X, Yuan Q, et al. Study on large convex aspherical lens testing [J]. Chinese Journal of Lasers. 2014, 41(4): 0408003.
宋强, 杨宝喜, 袁乔, 等. 大口径凸非球面面形检测方法研究 [J]. 中国激光. 2014, 41(4): 0408003.

【12】Yao J G, Zhang J P, Zheng L H, et al. Study on interference null compensator testing [J]. Acta Optica Sinica. 2015, 36(6): 0622003.
姚劲刚, 张金平, 郑列华, 等. 干涉零位补偿检验研究 [J]. 光学学报. 2015, 36(6): 0622003.

【13】Chang J, Li F Y, Weng Z C, et al. Testing large convex aspherical surface with computer-generated holography [J]. Acta Optica Sinica. 2003, 23(10): 1266-1268.
常军, 李凤友, 翁志成, 等. 用计算全息法检测大口径凸非球面的研究 [J]. 光学学报. 2003, 23(10): 1266-1268.

【14】Li M, Yan L S, Xue D L, et al. Hybrid compensation testing of convex asphere with computer generated holograms and fold sphere [J]. Acta Optica Sinica. 2015, 35(11): 1122001.
李明, 闫力松, 薛栋林, 等. 计算机再现全息与辅助球面混合补偿检测凸非球面方法研究 [J]. 光学学报. 2015, 35(11): 1122001.

【15】Ye L, Zhang J P, Zheng L H, et al. Design of back null compensator test method of convex aspherical surface [J]. Acta Photonica Sinica. 2015, 44(4): 0422002.
叶璐, 张金平, 郑列华, 等. 凸非球面背向零位补偿检验的设计方法 [J]. 光子学报. 2015, 44(4): 0422002.

引用该论文

Qi Lili,Zheng Liehua,Ye Lu,Zhang Jinping. Convex Aspheric Surface Testing Method Using an Autocollimation Lens[J]. Acta Optica Sinica, 2020, 40(8): 0822001

戚丽丽,郑列华,叶璐,张金平. 自准校正单透镜检验凸非球面的方法研究[J]. 光学学报, 2020, 40(8): 0822001

被引情况

【1】赵鹏玮,戚丽丽,张金平,郑列华. 自准校正透镜位于共轭后点前的凹非球面检验. 光学学报, 2020, 40(20): 2022002--1

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF