应用于激光陀螺的高反镜在加工安装过程中不可避免地会引入疵病,从而对入射光产生调制作用,引发光散射。为了研究划痕状疵病尺寸发生变化时散射场的变化规律,采用有限元法和多物理场仿真软件建立了高反镜表面截面形状为矩形的单划痕疵病散射模型。通过改变疵病的宽度、深度,分析激光散射场的空间分布变化;用搭建的积分散射测量系统检测不同宽度、深度的疵病,并与仿真结果进行对比。实验结果表明,不同尺寸疵病的散射场变化趋势与仿真结果基本吻合,为高反镜表面疵病的检测工作提供了理论依据和参考。

In the process of fabrication and installation, defects will inevitably be introduced into the mirror used in laser gyro, which will modulate the incident light and induce light scattering. In order to study the variation law of scattering field when scratch defect size changes, the scattering model of single scratch defect with rectangular cross-section on the surface of high reflection mirror is established by using finite element method and multi physical field simulation software. Analyze the spatial distribution of laser scattering field by changing the width and depth of the defect; The integrated scattering measurement system is built to detect the defects with different depth and width, and compare them with the simulation results. Experimental results show that the change trend of scattering field of defects with different sizes is basically consistent with the change trend of simulation results, which provide theoretical basis and reference for the detection of surface defects of high-reflection mirrors.