飞秒激光具有独特的超短脉宽和极高的峰值强度,飞秒激光直写技术已广泛用于功能化微流控芯片的制备。从3个方面针对基于飞秒激光直写技术的微流控芯片进行综述:不同材料微流控芯片中的飞秒激光功能器件集成技术、飞秒激光集成微流控芯片的多功能应用以及微流控芯片的高效率飞秒激光加工技术。通过对飞秒激光直写技术在微流控领域的研究结果进行总结与归纳,为飞秒激光直写技术制备微流控芯片的研究、应用及发展方向提供参考。

Femtosecond laser direct writing technology has been extensively used for the preparation of functional microfluidic chips because of ultrashort pulse duration and extremely high peak intensity of femtosecond lasers. This study summarizes the following three research directions based on the direct writing technology of femtosecond lasers for microfluidic chips: the integration technology of functional devices fabricated by femtosecond lasers in microfluidic chips with different materials, the multi-functional applications of microfluidic chips integrated by femtosecond lasers, and the rapid processing of microfluidic chips using femtosecond lasers. Furthermore, according to the summaries on the research results of femtosecond laser direct writing technology in the field of microfluidics, this study provides a reference for the research, application, and future development of the microfluidic chips prepared using femtosecond laser direct writing technology.