中国激光, 2020, 47 (6): 0600002, 网络出版: 2020-06-03   

碳化硅陶瓷基复合材料激光刻蚀技术研究进展 下载: 2129次

Research Advancement on Laser Etching Technology of Silicon Carbide Ceramic Matrix Composite
作者单位
1 西安理工大学机械与精密仪器工程学院, 陕西 西安 710048
2 西安交通大学机械制造系统工程国家重点实验室, 陕西 西安 710054
摘要
碳化硅陶瓷基复合材料(CMC-SiC)具有密度低、强度高、耐高温、抗腐蚀等优点,在航空航天领域具有广泛的应用潜力。但是CMC-SiC属于具有超高硬度且各向异性的难加工材料,常规加工技术难以胜任这种新型材料的优质高效加工。激光加工凭借加工质量高、非接触加工、输入热量低、适用范围广、易于和数控技术结合实现自动化等优势,有望成为CMC-SiC材质构件精密制造的主流技术。本文从CMC-SiC与激光的相互作用机理出发,分析了激光加工CMC-SiC中出现的典型热致缺陷,阐述了超短脉冲激光在CMC-SiC精密加工中展现的优势。在此基础上,指出了CMC-SiC激光加工技术的发展趋势,旨在为新型航空航天CMC-SiC材质构件的精密制造提供理论依据与技术参考。
Abstract
Silicon carbide ceramic matrix composite (CMC-SiC) has many advantages, such as low density, high strength, high-temperature resistance, and corrosion resistance. It has application prospects in the field of aerospace. However, CMC-SiC is a kind of difficult-to-machine material, with ultra-high hardness and anisotropy. Conventional processing technologies are unsuitable for the high quality and efficient processing of CMC-SiC. Laser processing with high processing quality, non-contact, low heat input, wide range of application, and easy to combine with numerical control technology to achieve automation, has prospects of becoming the mainstream technology for precision processing of CMC-SiC. We analyze the typical thermally induced defects in laser processing based on the interaction mechanism of CMC-SiC with laser. We describe the advantages of ultrashort pulse laser in the CMC-SiC precision processing. In this context, we spotlight the development trend of laser processing technology for CMC-SiC and provide a theoretical basis and technical reference for the precision manufacturing of new aerospace CMC-SiC components parts.

翟兆阳, 梅雪松, 王文君, 崔健磊. 碳化硅陶瓷基复合材料激光刻蚀技术研究进展[J]. 中国激光, 2020, 47(6): 0600002. Zhai Zhaoyang, Mei Xuesong, Wang Wenjun, Cui Jianlei. Research Advancement on Laser Etching Technology of Silicon Carbide Ceramic Matrix Composite[J]. Chinese Journal of Lasers, 2020, 47(6): 0600002.

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