光学仪器, 2019, 41 (5): 30, 网络出版: 2020-05-19
光学非球面磁性复合流体抛光运动控制算法设计
Design of motion control algorithm for magnetic compound fluid polishing of optical aspheric components
光学非球面 磁性复合流体抛光 运动控制算法 运动学建模 D-H法 aspheric magnetic components magnetic compound fluid polishing motion control algorithm kinematic modeling D-H method
摘要
为了实现高精度光学非球面元件超精密抛光加工的需要,设计了光学非球面磁性复合流体抛光运动控制算法。通过分析光学非球面磁性复合流体抛光加工原理,建立抛光头在加工过程中相对非球面表面的位态变换关系,采用D-H法建立抛光试验台运动学模型,求解抛光过程中抛光头位姿量,运用逆向运动学求解方法计算试验台运动量;开展工艺实验,对该运动控制算法进行验证。实验结果表明,所设计的抛光运动控制算法能够准确指导光学非球面元件抛光加工。
Abstract
To meet the need of ultra-precision polishing of optical aspheric elements with high precision, the motion control algorithm is designed for magnetic compound fluid polishing of aspheric magnetic components. Optical aspheric magnetic compound fluid polishing principle is analyzed. The relation between the configuration of the polishing head and the aspheric surface is established. The D-H method is used to establish the kinematics model of the polishing test platform and the head posture during the polishing process is solved. Process experiments are carried out to verify the motion control algorithm. Experimental results show that the designed motion control algorithm can process optical aspherical elements reasonably.
姚磊, 姜晨, 时陪兵, 胡吉雄, 严广和, 张勇斌. 光学非球面磁性复合流体抛光运动控制算法设计[J]. 光学仪器, 2019, 41(5): 30. Lei YAO, Chen JIANG, Peibing SHI, Jixiong HU, Guanghe YAN, Yongbin ZHANG. Design of motion control algorithm for magnetic compound fluid polishing of optical aspheric components[J]. Optical Instruments, 2019, 41(5): 30.