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基于衍射重叠相位恢复术的平面偏振双折射测量

Birefringence Measurement Based on Ptychographic Iterative Engine in Planar Polarimeter

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摘要

基于衍射重叠相位恢复术(PIE),提出一种新的平面偏振双折射测量方法。利用PIE测量方法,对样品在两种不同偏振状态下形成的暗场探测光复振幅进行重建,并分别从探测光相位及复振幅之比中简单准确地提取相位延迟量及方位角,实现了双折射样品的二维定量测量。采用双折射分辨率靶对所提方法进行实验验证,所得结果与分辨率靶实际分布完全相符,相位延迟量最大误差不超过23.9 nm,方位角误差为0.49°。该方法结构简单,能解决传统平面偏光仪无法实现定量双折射测量的难题,同时减少了PIE扫描的次数,缩短数据采集时间及处理流程,为大口径光学器件的双折射检测提供了一种实用方法。

Abstract

A novel birefringence measurement method based on a ptychographic iterative engine (PIE) in a planar polarimeter is proposed in this paper. The complex amplitudes formed by a sample in a dark field under two different polarization states are reconstructed using the proposed PIE method. The phase retardation and azimuth angle are simply and accurately extracted from the probe phase and ratio of two complex amplitudes, respectively, and the two-dimensional quantitative measurement of birefringence samples is realized. A birefringence resolution target is used to verify the proposed method, and the obtained results are completely consistent with the resolution target''s actual distributions. The maximum phase retardation error is no more than 23.9 nm, and the azimuth angle error is 0.49°. This method has a simple structure and enables a traditional planar polarimeter to quantitatively measure birefringence. The proposed method reduces the number of required PIE scans and shortens the data collection time and processing process, providing a practical method for the birefringence measurement of large-aperture optical devices.

Newport宣传-MKS新实验室计划
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中图分类号:O436

DOI:10.3788/CJL201946.1204003

所属栏目:测量与计量

基金项目:国家自然科学基金、上海市自然科学基金;

收稿日期:2019-07-09

修改稿日期:2019-08-19

网络出版日期:2019-12-01

作者单位    点击查看

程北:上海科技大学物质科学与技术学院, 上海 201210中国科学院上海光学精密机械研究所高功率激光物理联合实验室, 上海 201800中国科学院大学材料与光电研究中心, 北京 100049
张雪洁:中国科学院上海光学精密机械研究所高功率激光物理联合实验室, 上海 201800
刘诚:中国科学院上海光学精密机械研究所高功率激光物理联合实验室, 上海 201800
朱健强:中国科学院上海光学精密机械研究所高功率激光物理联合实验室, 上海 201800

联系人作者:朱健强(jqzhu@siom.ac.cn)

备注:国家自然科学基金、上海市自然科学基金;

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引用该论文

Cheng Bei,Zhang Xuejie,Liu Cheng,Zhu Jianqiang. Birefringence Measurement Based on Ptychographic Iterative Engine in Planar Polarimeter[J]. Chinese Journal of Lasers, 2019, 46(12): 1204003

程北,张雪洁,刘诚,朱健强. 基于衍射重叠相位恢复术的平面偏振双折射测量[J]. 中国激光, 2019, 46(12): 1204003

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