微环谐振器是实现硅基光电子片上集成的重要器件。为此,从微环谐振器的原理出发,主要描述了中红外领域高品质因子微环谐振器的研究意义与发展历程,分析了不同材料体系微环谐振器在工艺和实际应用上的优缺点;介绍了基于Vernier效应的级联微环谐振器在中红外波段的传感和滤波领域的理论研究;并回顾了中红外克尔光学频率梳的产生原理和发展历程,在理论上证明了锗条形波导微环可以在泵浦功率低至80 mW的情况下实现带宽接近一个倍频程的宽谱光频梳,并对研究进展进行了总结和展望。

The micro-ring resonator is an important device for the integration of silicon photonic chips. Based on the principle of micro-ring resonators, the paper mainly describes the research significance and development process of high-quality factor micro-ring resonators in the mid-infrared field, and analyzes the advantages and disadvantages of micro-ring resonators in different material systems in terms of technology and practical applications; then, we introduce the theoretical research of the cascaded micro-ring resonator based on the Vernier effect in the field of sensing and filtering in the mid-infrared region; the generation principle and development history of the mid-infrared Kerr optical frequency comb are reviewed, and we theoretically prove the germanium strip waveguide micro-ring can realize a wide-spectrum optical frequency comb with a bandwidth close to an octave at a pump power as low as 80 mW. Finally, we summarize the research progress and prospect the future applications.