激光与光电子学进展, 2020, 57 (15): 153004, 网络出版: 2020-08-04   

高分辨率宽光谱范围微型光谱仪的设计与分析 下载: 1429次

Design and Analysis of Micro-Spectrometer with High Resolution and Wide Spectral Range
钟卉 *
作者单位
北京空间机电研究所先进光学遥感技术北京市重点实验室, 北京 100094
摘要
针对微型光谱仪难于兼顾光谱分辨率和光谱范围的问题,提出一种级联微型法布里-珀罗干涉仪和微型曲面光栅光谱仪的设计方法。分析了两种光谱仪匹配设计的条件以及级联光学系统的光谱特性,并提出了一种光谱数据重构算法。用ZEMAX软件设计了一款激光拉曼光谱仪,该光谱仪的尺寸为25 mm×6 mm×6 mm,数值孔径为0.22,拉曼光谱范围为150~3200 cm -1,光谱分辨率约为6 cm -1。仿真了标准拉曼光谱信号的扫描过程,并用长度为2.4 mm的线阵探测器对光谱信号进行采样,重构的拉曼光谱分辨率约为6.4 cm -1,与标准拉曼光谱的偏差为0.4 cm -1,验证了该设计方法和重构算法的可行性。同时,该光谱仪可以基于微机电系统工艺实现微型化和低成本化,满足手持式、便携式光谱检测和工业在线光谱检测的应用需求,具有较高的实际应用价值。
Abstract
Aim

ing at the problem that it is difficult for micro-spectrometer to take into account both spectral resolution and spectral range, a design method of cascade Fabry-Perot interferometer and micro curved grating spectrometer is proposed in this paper. The matching conditions of the two spectrometers and the spectral characteristics of the cascade optical systems are analyzed, and a spectral data reconstruction algorithm is proposed. A laser Raman spectrometer is designed with ZEMAX software. The spectrometer has a size of 25 mm×6 mm×6 mm, a numerical aperture of 0.22, a Raman spectrum range of 150-3200 cm -1, and a spectral resolution of about 6 cm -1. The scanning process of the standard Raman spectrum signal is simulated, and the spectral signal is sampled with a 2.4 mm long linear array detector. The resolution of the reconstructed Raman spectrum is about 6.4 cm -1, and the deviation from the standard Raman spectrum is 0.4 cm -1. The feasibility of the design method and reconstruction algorithm are verified. At the same time, the spectrometer can be miniaturized and the cost can be reduced based on micro-electro-mechanical system technology, which can meet the application requirements of hand-held, portable spectral detection and industrial on-line spectral detection, and has high practical application value.

钟卉. 高分辨率宽光谱范围微型光谱仪的设计与分析[J]. 激光与光电子学进展, 2020, 57(15): 153004. Hui Zhong. Design and Analysis of Micro-Spectrometer with High Resolution and Wide Spectral Range[J]. Laser & Optoelectronics Progress, 2020, 57(15): 153004.

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