Chinese Optics Letters, 2019, 17 (6): 061301, Published Online: Jun. 5, 2019
CL-TWE Mach–Zehnder electro-optic modulator based on InP-MQW optical waveguides Download: 789次
130.3120 Integrated optics devices 250.4110 Modulators 230.4205 Multiple quantum well (MQW) modulators
Abstract
In this Letter, we reported the preliminary results of an integrating periodically capacitive-loaded traveling wave electrode (CL-TWE) Mach–Zehnder modulator (MZM) based on InP-based multiple quantum well (MQW) optical waveguides. The device configuration mainly includes an optical Mach–Zehnder interferometer, a direct current electrode, two phase electrodes, and a CL-TWE consisting of a U electrode and an I electrode. The modulator was fabricated on a 3 in. InP epitaxial wafer by standard photolithography, inductively coupled plasma dry etching, wet etching, electroplating, etc. Measurement results show that the MZM exhibits a 3 dB electro-optic bandwidth of about 31 GHz, a V π of 3 V, and an extinction ratio of about 20 dB.
Guang Qian, Bin Niu, Wu Zhao, Qiang Kan, Xiaowen Gu, Fengjie Zhou, Yuechan Kong, Tangsheng Chen. CL-TWE Mach–Zehnder electro-optic modulator based on InP-MQW optical waveguides[J]. Chinese Optics Letters, 2019, 17(6): 061301.