Chinese Optics Letters, 2019, 17 (6): 061301, Published Online: Jun. 5, 2019   

CL-TWE Mach–Zehnder electro-optic modulator based on InP-MQW optical waveguides Download: 789次

Author Affiliations
1 Science and Technology on Monolithic Integrated Circuits and Modules Laboratory, Nanjing Electronic Devices Institute, Nanjing 210016, China
2 Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Abstract
In this Letter, we reported the preliminary results of an integrating periodically capacitive-loaded traveling wave electrode (CL-TWE) Mach–Zehnder modulator (MZM) based on InP-based multiple quantum well (MQW) optical waveguides. The device configuration mainly includes an optical Mach–Zehnder interferometer, a direct current electrode, two phase electrodes, and a CL-TWE consisting of a U electrode and an I electrode. The modulator was fabricated on a 3 in. InP epitaxial wafer by standard photolithography, inductively coupled plasma dry etching, wet etching, electroplating, etc. Measurement results show that the MZM exhibits a 3 dB electro-optic bandwidth of about 31 GHz, a Vπ of 3 V, and an extinction ratio of about 20 dB.

Guang Qian, Bin Niu, Wu Zhao, Qiang Kan, Xiaowen Gu, Fengjie Zhou, Yuechan Kong, Tangsheng Chen. CL-TWE Mach–Zehnder electro-optic modulator based on InP-MQW optical waveguides[J]. Chinese Optics Letters, 2019, 17(6): 061301.

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