光学学报, 2019, 39 (9): 0912003, 网络出版: 2019-09-09
全视场外差长腔干涉测量技术 下载: 1100次
Full-Field Heterodyne Long-Cavity Interferometry
测量 全视场外差 长腔干涉 面形检测 低差频移相 measurement full-field heterodyne long-cavity interference surface shape measurement low difference-frequency phase-shift
摘要
提出了一种适用于长焦光学镜片面形测量的新型激光干涉仪。利用全视场外差移相技术能有效抑制振动和大气等环境因素对长腔干涉测量的影响,采用Twyman-Green干涉仪结构,实现测量波面和参考波面的外差相干测量。搭建了实验验证系统,实验证明该方案能较好地抑制外界振动和大气湍流对测量精度的影响,实现了较高精度的长腔干涉测量,仪器的RMS(Root Mean Square)重复测量精度达到0.45‰λ 。该技术可以作为长腔干涉测量的可选方案之一。
Abstract
This paper proposes a new laser interferometer which is suitable for measuring the profile of an optical lens with a long focal length. Full-field heterodyne phase-shift technology is used to suppress the effects of factors such as vibration and the atmosphere on long-cavity interferometry. The heterodyne coherent measurement of the measured and reference wavefronts is achieved using a Twyman-Green interferometer structure. Experimental equipment is developed, and an experiment is conducted to prove that the novel setup can suppress the influences of external vibration and atmospheric turbulence on the measurement accuracy,achieving a long-cavity measurement with a root mean square repeated measurement accuracy of 0.45‰λ. Thus, this technology can prove to be a valuable alternative to traditional long-cavity interferometry.
伍洲, 李杨, 相里斌, 张文喜, 孔新新, 尚万祺, 吕彤. 全视场外差长腔干涉测量技术[J]. 光学学报, 2019, 39(9): 0912003. Zhou Wu, Yang Li, Bin Xiangli, Wenxi Zhang, Xinxin Kong, Wanqi Shang, Tong Lü. Full-Field Heterodyne Long-Cavity Interferometry[J]. Acta Optica Sinica, 2019, 39(9): 0912003.