Photonics Research, 2020, 8 (11): 11001662, Published Online: Oct. 10, 2020   

Hybrid nano-scale Au with ITO structure for a high-performance near-infrared silicon-based photodetector with ultralow dark current Download: 656次

Author Affiliations
1 Key Laboratory for Renewable Energy, Beijing Key Laboratory for New Energy Materials and Devices, Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
2 University of Chinese Academy of Sciences, Beijing 100049, China
3 Center of Materials and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
4 The Yangtze River Delta Physics Research Center, Liyang 213000, China
5 Department of Physics, School of Science, Beijing Jiaotong University, Beijing 100044, China
6 Songshan Lake Materials Laboratory, Dongguan 523808, China
7 e-mail: hchen@iphy.ac.cn
Abstract
An internal photoemission-based silicon photodetector detects light below the silicon bandgap at room temperature and can exhibit spectrally broad behavior, making it potentially suited to meet the need for a near-infrared pure Si photodetector. In this work, the implementation of a thin Au insertion layer into an ITO/n-Si Schottky photodetector can profoundly affect the barrier height and significantly improve the device performance. By fabricating a nanoscale thin Au layer and an ITO electrode on a silicon substrate, we achieve a well-behaved ITO/Au/n-Si Schottky diode with a record dark current density of 3.7×10-7 A/cm2 at -1 V and a high rectification ratio of 1.5×108 at ±1 V. Furthermore, the responsivity has been obviously improved without sacrificing the dark current performance of the device by decreasing the Au thickness. Such a silicon-based photodetector with an enhanced performance could be a promising strategy for the realization of a monolithic integrated pure silicon photodetector in optical communication.

Xinxin Li, Zhen Deng, Jun Li, Yangfeng Li, Linbao Guo, Yang Jiang, Ziguang Ma, Lu Wang, Chunhua Du, Ying Wang, Qingbo Meng, Haiqiang Jia, Wenxin Wang, Wuming Liu, Hong Chen. Hybrid nano-scale Au with ITO structure for a high-performance near-infrared silicon-based photodetector with ultralow dark current[J]. Photonics Research, 2020, 8(11): 11001662.

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