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基于径向基函数网络的光学测量系统误差修正算法

Error Correction Algorithm for Optical Measurement System Based on Radial Basis Function Network

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摘要

针对光学测量系统杂散光限制后,残留杂散光的固有误差以及系统老化所带来的时变误差的问题,提出一种基于径向基函数(RBF)网络的光度测量系统误差修正算法,以进一步提高光学测量系统的测量精度。利用点源透射率(PST)的方法对光度测量系统的测量误差分布情况进行分析;在杂散光分布影响近似估计的基础上,设计并改进一种基于RBF网络的光度测量系统误差修正算法。采用TracePro进行仿真对比试验,结果表明,通过误差补偿网络的修正,可将发光强度的测量误差降低至0.24%以下;而且此算法与一般RBF算法相比,其收敛速度和逼近能力有了明显的提高,为系统杂散光限制后衍生问题的解决提供了更为快速有效的修正工具。

Abstract

To solve the problems of inherent errors caused by the residual stray light after the stray light limitation of the optical systems as well as time-varying errors caused by system aging and improve the accuracy of the optical measurement system, an error correction algorithm is proposed for a photometric measurement system based on the radial basis function (RBF) network. In this study, the point source transmittivity is used to analyze the measurement error distribution of the photometric measurement system. Further, the error correction algorithm is designed and improved based on the RBF network in accordance with the approximate estimation of stray light distribution. TracePro software is employed for comparative simulations. The results demonstrate that the photometric measurement error can be reduced to less than 0.24% by correcting the error compensation network. Compared with the general RBF network, the convergence speed and approximation ability of the proposed algorithm are obviously improved, providing a more rapid and effective tool for solving the problems entailed by the stray light limitation.

Newport宣传-MKS新实验室计划
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中图分类号:O432.2

DOI:10.3788/AOS202040.0212004

所属栏目:仪器,测量与计量

基金项目:黑龙江省自然科学基金、哈尔滨市科技创新人才项目;

收稿日期:2019-07-23

修改稿日期:2019-09-19

网络出版日期:2020-02-01

作者单位    点击查看

薛萍:哈尔滨理工大学自动化学院, 黑龙江 哈尔滨 150080
何海:哈尔滨理工大学自动化学院, 黑龙江 哈尔滨 150080
王宏民:哈尔滨理工大学自动化学院, 黑龙江 哈尔滨 150080

联系人作者:薛萍(1043854913@qq.com); 何海(hai123193@163.com);

备注:黑龙江省自然科学基金、哈尔滨市科技创新人才项目;

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引用该论文

Xue Ping,He Hai,Wang Hongmin. Error Correction Algorithm for Optical Measurement System Based on Radial Basis Function Network[J]. Acta Optica Sinica, 2020, 40(2): 0212004

薛萍,何海,王宏民. 基于径向基函数网络的光学测量系统误差修正算法[J]. 光学学报, 2020, 40(2): 0212004

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