光学仪器, 2019, 41 (6): 40, 网络出版: 2020-05-19  

基于磁控溅射制备铜基表面增强拉曼散射基底

Fabrication of copper-based SERS substrates by magnetron sputtering
作者单位
1 上海理工大学 机械工程学院,上海 200093
2 上海理工大学 光电信息与计算机工程学院,上海 200093
3 上海大学 材料基因组工程研究院,上海 200041
摘要
为了提高拉曼光谱仪的探测灵敏度,设计了铜基表面增强拉曼散射(surface enhanced Raman scattering, SERS)薄膜基底。以Cu40Ti60合金为靶材,通过控制磁控溅射参数获得了一系列铜钛合金薄膜,采用脱合金法进一步获得了不同结构的铜基薄膜,系统地研究了不同溅射参数对铜基薄膜的SERS特性的影响,确定了制备SERS基底的最佳溅射参数。脱合金后所得铜膜具有多孔结构,能形成高强度局域电磁场,即SERS“热点”(hotspots),从而表现出优异的SERS增强性能。该基底制备成本低,重复性好,能用于灵敏检测且SERS增强因子可达1.8×107,具有较好的应用前景。
Abstract
In order to improve the detection sensitivity of Raman spectrometer, a copper-based surface-enhanced Raman scattering film substrate was designed. A series of copper-titanium alloy films were obtained by controlling the magnetron sputtering parameters with Cu40Ti60 alloy target. The copper-based films with different structures were systematically studied. The effects of different sputtering parameters on surface enhanced Raman scattering (SERS) characteristics of the copper-based films were investigated. The optimal sputtering parameters for the preparation of SERS substrates were determined. The copper film obtained after dealloying has a porous structure and can form a high-intensity local electromagnetic field, that is, SERS "hotspots", thereby exhibiting excellent SERS enhancement performance. The substrate is low in cost and good in repeatability by magnetron sputtering, and can achieve sensitive detection and SERS enhancement factor up to 1.8×107. It is one of the ideal choices for high performance SERS substrates and has a high application prospect.

何煜, 李强, 张玲, 潘登, 孙群. 基于磁控溅射制备铜基表面增强拉曼散射基底[J]. 光学仪器, 2019, 41(6): 40. Yu HE, Qiang LI, Ling ZHANG, Deng PAN, Qun SUN. Fabrication of copper-based SERS substrates by magnetron sputtering[J]. Optical Instruments, 2019, 41(6): 40.

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