传统的紫外熔石英元件加工方法本身会引入各类制造缺陷，需要后期加工来消除前期加工带来的缺陷，限制了熔石英元件的加工 质量和加工效率。针对这些问题，课题组提出了采用磁流变、离子束、保形光顺和流体动压抛光等可控柔体加工技术提升熔石英元件的加工效果，并开展了相关研究。主要介绍了课题组在关键技术上取得的重要进展，包括亚纳米精度表面控形制造技术、纳米精度本征表面控性生成方法、熔石英元件高精度低缺陷组合工艺与设备等一系列关键技术。通过探讨关键技术及其发展现状，为未来紫外熔石英元件高精度低缺陷制造技术的发展提供参考。

Various manufacturing defects would be introduced in traditional processing of ultraviolet fused silica components, which need to be eliminated by post-processing technique. Because of the defects, the processing efficiency and surface quality cannot meet the requirements. To solve these problems, the research group proposed controllable compliant techniques including magnetorheological finishing, ion beam figuring, conformal smoothing and hydrodynamic polishing to improve processing effect of fused silica components, and carried out related research. This paper mainly introduces the important progress made by the research group on key technologies, including sub-nanometer precision surface controlled manufacturing technology, nano-precision intrinsic surface property controlled manufacturing method, high-precision and low-defect combination process, equipment of fused silica component. Discussing key technologies and their development status, it provides references for the development of high precision and few defects manufacturing technology of ultraviolet fused silica components in the future.