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大口径高次非球面补偿检测方法的研究

Research on Compensation Testing Method for Large-Aperture and High-Order Aspheric Surface

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摘要

大口径高次非球面的加工检测是光学制造的难题之一。结合一个有效通光口径为900 mm、顶点曲率半径为2580 mm的高次非球面凹反射镜,推导出高次非球面的球差系数。基于三级像差理论,对高次非球面的法线像差进行补偿,求解了补偿系统的初始结构。设计了基于球面波和平面波的补偿系统,并对高次非球面凹反射镜进行研磨处理,经四维(4D)干涉仪检测得到其面型精度为0.022λ,满足实际测量要求。

Abstract

One of the difficult problems in optical manufacturing is to process and test large aperture and high-order aspheric surface. The spherical aberration coefficient of a high-order aspheric concave mirror with an effective aperture of 900 mm and a radius of curvature of 2580 mm was derived. Based on third-order aberration theory, the normal aberration of the high-order aspheric surface was compensated, and the initial structure of the compensation system was solved. Compensation systems based on spherical wave and plane wave were designed respectively, and the high-order aspheric concave mirrors were polished. The accuracy of the surface shape measured by four-dimensional interferometer is 0.022λ which meets the actual measurement requirements.

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中图分类号:O435

DOI:10.3788/LOP57.072203

所属栏目:光学设计与制造

收稿日期:2019-10-28

修改稿日期:2019-11-14

网络出版日期:2020-04-01

作者单位    点击查看

赵础矗:合肥工业大学光电技术研究院, 安徽 合肥 230009
胡明勇:合肥工业大学光电技术研究院, 安徽 合肥 230009
张少伟:上海航天控制技术研究所, 上海 201109
李兴隆:上海航天控制技术研究所, 上海 201109
李昭阳:合肥工业大学光电技术研究院, 安徽 合肥 230009

联系人作者:赵础矗(315356133@qq.com); 胡明勇(humy8@126.com);

【1】Liu J, Shu X W, Bai J, et al. Reserch on technique of large aperture-digital wavefront test [J]. Optical Instruments. 2003, 25(6): 3-7.
刘军, 舒晓武, 白剑, 等. 大口径数字波面检测技术的研究 [J]. 光学仪器. 2003, 25(6): 3-7.

【2】Liu L, Chen X D, Xiong L, et al. Angle error investigation in laser tracker testing large aspheric mirrors [J]. Chinese Journal of Lasers. 2016, 43(11): 1104003.
刘力, 陈新东, 熊玲, 等. 大口径非球面镜检测中激光跟踪仪测角误差研究 [J]. 中国激光. 2016, 43(11): 1104003.

【3】An Q C, Zhang J X, Yang F. Large aperture reflection mirror figure analysis with singular value [J]. Laser & Optoelectronics Progress. 2014, 51(8): 081204.
安其昌, 张景旭, 杨飞. 奇异值方法在大口径反射镜面形分析中的应用 [J]. 激光与光电子学进展. 2014, 51(8): 081204.

【4】Meng X H, Wang Y G, Li W Q, et al. Fabricating and testing of Φ420 mm high-order aspheric lens [J]. Optics and Precision Engineering. 2016, 24(12): 3068-3075.
孟晓辉, 王永刚, 李文卿, 等. Φ420 mm高次非球面透镜的加工与检测 [J]. 光学精密工程. 2016, 24(12): 3068-3075.

【5】He Y H, Li Q, Gao B, et al. Measurement of the transmission wavefront of a large-aperture aspheric lens based on computer-generated hologram [J]. Laser & Optoelectronics Progress. 2019, 56(2): 021202.
何宇航, 李强, 高波, 等. 基于计算全息元件的大口径非球面透镜透射波前检测方法 [J]. 激光与光电子学进展. 2019, 56(2): 021202.

【6】He L, Wu Z H, Kang Y, et al. High order aspheric testing with large asphericity, fast focal ratio and large diameter [J]. Laser & Optoelectronics Progress. 2016, 53(12): 122201.
何丽, 武中华, 康燕, 等. 大非球面度快焦比中大口径高次非球面检测 [J]. 激光与光电子学进展. 2016, 53(12): 122201.

【7】Пуряев Д Т. Optical aspheric surface detection[M]. Yang L: Transl. Beijing: Science Press, 1982, 248-250.
普里亚耶夫, [M]. 光学非球面检验. 杨力: 译. 北京: 科学出版社, 1982, 248-250.

【8】Pan J H. The design, manufacture and test of the aspherical optical surfaces[M]. Suzhou: Soochow University Press, 2004, 4.
潘君骅. 光学非球面的设计、加工与检验[M]. 苏州: 苏州大学出版社, 2004, 4.

【9】Hao P M. Design of auxiliary optical system for aspheric surface testing[M]. Beijing: Science Press, 2017, 161-163.
郝沛明. 非球面检验的辅助光学系统设计[M]. 北京: 科学出版社, 2017, 161-163.

【10】Hu M Y, Liu W Q, Zhang Q, et al. Testing of paraboloid mirror with super relative aperture using compensator [J]. Chinese Journal of Quantum Electronics. 2006, 23(2): 155-158.
胡明勇, 刘文清, 张权, 等. 超大相对孔径抛物面反射镜的补偿检验 [J]. 量子电子学报. 2006, 23(2): 155-158.

【11】Lin X Y. ZEMAX optical design super learning manual[M]. Beijing: Posts & Telecom Press, 2014, 9-13.
林晓阳. ZEMAX光学设计超级学习手册[M]. 北京: 人民邮电出版社, 2014, 9-13.

【12】Yang X H, Shen W X, Zhang X J, et al. Comparison among different interferometers for measuring power spectral density of optical elements [J]. Chinese Journal of Lasers. 2016, 43(9): 0904002.
杨相会, 沈卫星, 张雪洁, 等. 不同干涉仪检测光学元件功率谱密度的比较 [J]. 中国激光. 2016, 43(9): 0904002.

引用该论文

Zhao Chuchu,Hu Mingyong,Zhang Shaowei,Li Xinglong,Li Zhaoyang. Research on Compensation Testing Method for Large-Aperture and High-Order Aspheric Surface[J]. Laser & Optoelectronics Progress, 2020, 57(7): 072203

赵础矗,胡明勇,张少伟,李兴隆,李昭阳. 大口径高次非球面补偿检测方法的研究[J]. 激光与光电子学进展, 2020, 57(7): 072203

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