应用光学, 2020, 41 (4): 810, 网络出版: 2020-08-20  

基于组合标准器的显微CT系统测量方法研究 下载: 578次

Measurement method research for Micro-CT system based on combined calibrator
作者单位
天津大学 精密仪器与光电子工程学院,天津 300110
摘要
为保证显微CT系统测量精度,采用标准器与样品共同测量的方式设计了可用于共同测量的组合标准器,提出显微CT系统测量过程中修正比例误差与阈值误差的方法。在不改变显微CT系统扫描参数的情况下,对航空航天常用的轻质材料聚四氟乙烯样品进行独立测量,并与基于组合标准器的测量进行对比实验。结果表明,基于组合标准器的显微CT系统测量方法较样品独立测量方法有效减小测量误差1 μm~4 μm,鲁棒性好。
Abstract
In order to ensure the measurement accuracy of the Micro-Computed Tomography (Micro-CT) system, a combined measurement mode of the calibrator and the sample was adapted to design the combined calibrator which can be used for the combined measurement, and a method to correct the proportional error and the threshold error in the measurement process of the Micro-CT system was proposed. Without changing the scanning parameters of the Micro-CT system, the samples of polytetrafluoroethylene, a light material commonly used in aerospace, were measured independently and compared with the measurements based on the combined calibrator. The results show that compared with the sample independent measurement method, the proposed method can effectively reduce the measurement error of 1 μm~4 μm and has better robustness.

沙桐桐, 胡晓东, 赵金涛, 邹晶. 基于组合标准器的显微CT系统测量方法研究[J]. 应用光学, 2020, 41(4): 810. Tongtong SHA, Xiaodong HU, Jintao ZHAO, Jing ZOU. Measurement method research for Micro-CT system based on combined calibrator[J]. Journal of Applied Optics, 2020, 41(4): 810.

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