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基于复合带宽积分平均衍射效率的倾斜误差研究

Tilt Error Based on Comprehensive Bandwidth Integral Average Diffraction Efficiency

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摘要

在系统装调过程中引入的倾斜误差会影响衍射光学元件(DOEs)的衍射效率。入射角度的增大也会影响DOEs的衍射效率。基于多层衍射光学元件(MLDOEs)的相位延迟表达式,提出了斜入射时衍射效率和带宽积分平均衍射效率(BIADE)与倾斜误差的理论关系模型。分析了斜入射时倾斜误差对衍射效率和BIADE的影响。建立了工作在一定入射角度范围内的复合BIADE与倾斜误差的关系。当工作在8~12 μm波段的MLDOEs的入射角度范围为0°~20°时,若要实现98%的复合BIADE,倾斜误差角度应控制在0.25°范围内。进一步分析了存在偏心误差和相对微结构高度误差等其他误差因素时,要达到一定的复合BIADE,所需对应的倾斜误差大小。该方法和结论可以用于指导混合光学系统中MLDOEs的设计与装调。

Abstract

The tilt error introduced in the system assembling process affects the diffraction efficiency of diffractive optical elements (DOEs). An increase in the incident angle also affects the diffraction efficiency of DOEs. Based on the phase delay expression of multilayer DOEs (MLDOEs), this paper proposes a theoretical model of the relationship between the diffraction efficiency/bandwidth integrated average diffraction efficiency (BIADE) and the tilt error. The effect of the tilt error on the diffraction efficiency/BIADE at oblique incidence is analyzed. The relationship between the comprehensive BIADE working within a certain incidence angle and the tilt error is established. When the range of incident angle for the MLDOEs, operating within the 8--12-μm infrared waveband, is 0°--20°, if the comprehensive BIADE is required to be higher than 98%, the tilt error should be less than 0.25°. When there are other errors, such as the decenter error and the microstructure height error, the tilt error is further analyzed to reach the required comprehensive BIADE. The method and conclusions can be used to assist in designing and assembling the MLDOEs in hybrid optical systems.

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中图分类号:O436

DOI:10.3788/AOS202040.0805001

所属栏目:衍射与光栅

基金项目:国家自然科学基金、江苏省高校自然科学研究项目;

收稿日期:2019-12-06

修改稿日期:2020-01-06

网络出版日期:2020-04-01

作者单位    点击查看

杨亮亮:盐城师范学院物理与电子工程学院, 江苏 盐城 224007
刘成林:盐城师范学院物理与电子工程学院, 江苏 盐城 224007
陆法林:盐城师范学院物理与电子工程学院, 江苏 盐城 224007
童巧英:盐城师范学院物理与电子工程学院, 江苏 盐城 224007
赵勇兵:盐城师范学院物理与电子工程学院, 江苏 盐城 224007
郭仁甲:盐城师范学院物理与电子工程学院, 江苏 盐城 224007

联系人作者:杨亮亮(yang_liangliang@163.com)

备注:国家自然科学基金、江苏省高校自然科学研究项目;

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引用该论文

Yang Liangliang,Liu Chenglin,Lu Falin,Tong Qiaoying,Zhao Yongbing,Guo Renjia. Tilt Error Based on Comprehensive Bandwidth Integral Average Diffraction Efficiency[J]. Acta Optica Sinica, 2020, 40(8): 0805001

杨亮亮,刘成林,陆法林,童巧英,赵勇兵,郭仁甲. 基于复合带宽积分平均衍射效率的倾斜误差研究[J]. 光学学报, 2020, 40(8): 0805001

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