飞秒激光直写技术相比于传统加工方式以及其他先进的微纳米加工手段在可控微纳米结构加工方面具有一定的优势,如无需掩模、适合任意材料、热效应小等,因此被用来制备多样化的仿生微纳米结构表面,开发各种领域的应用,如自清洁、油水分离、水雾收集等。分析了利用飞秒激光在不同材料上制备多样微纳米结构的形成机理和设计思路,总结了国内外有关通过飞秒激光制备仿生微纳米表面的最新研究进展,并从表面润湿性的相关概念及理论模型、飞秒激光可控制备多样微纳米结构以及相关工业生活应用等方面进行了探索研究。最后分析了目前飞秒激光加工技术在微纳米制造领域存在的困难和挑战,并对未来其在相关领域的发展进行了展望。

Compared to traditional processing methods and other advanced micro/nano processing methods, femtosecond laser direct writing technology has certain advantages in controllable micro/nano processing, such as no mask, suitable for any material, and small thermal effect. Therefore, it is always used to prepare bionic micro/nano structure surfaces for applications in various fields such as self-cleaning, oil-water separation, and water mist collection. The formation mechanism and design ideas of preparing various micro/nano structures on different materials by femtosecond lasers are analyzed, and the latest research progress on the preparation of the bionic micro/nano structure surfaces by femtosecond laser is summarized. Then, the related concepts and theoretical models of surface wettability, controllable preparation of various micro/nano structures by femtosecond laser, and related industrial applications are explored. Finally, the difficulties and challenges of femtosecond laser processing technology in the field of micro/nano manufacturing are analyzed, and its future development in related fields is prospected.