为提高手机显示屏的耐摩擦、防划伤能力,降低显示屏破碎的风险,研制了在可见光波段的硬质增透膜。通过逐步提高设计中SixNy膜层厚度在薄膜总厚度中所占的比例,优化沉积工艺,改善薄膜硬度。根据增透膜的设计理论、合理的膜层分组方式和逆向反演分析法完成膜系设计,降低了薄膜反射率。测试结果表明,在可见光波段范围内,薄膜的平均反射率为0.58%,硬度达到15.99 GPa。

To improve the anti-friction and anti-scratch ability of the mobile phone display screen and reduce the risk of display screen breakage, a hard antireflection film in visible light band has been prepared in this paper. By gradually increasing the proportion of the thickness of the Si_xN_y film in the total thickness, the deposition process is optimized and the film hardness is improved. According to the design theory of antireflection coating, reasonable film grouping mode and reverse inversion analysis method, the film system design is completed, and the reflectivity of the film is reduced. Testing results show that the average reflectivity of the film is 0.58% and the hardness is 15.99 GPa.