设计了一种压电陶瓷驱动的精密倾斜平台及其倾斜角度控制方法,实现了高精度倾斜控制。该控制系统主要由主控制器、位移探测模块、数模转换模块、高压驱动模块4部分组成,可实现快速精确的倾斜控制。运用了球透镜与位置敏感传感器相结合的方法测量和控制精密倾斜控制平台的倾斜角度。实验结果表明,该平台控制精度优于0.5 μrad,且结构简单、易于装设,特别适用于要求倾斜角度精密控制且低成本的工程应用环境。

A precise tilt platform driven by piezoelectric ceramics and the control method for tilt angle are designed to achieve high precision tilt control. The control system is mainly composed of a main controller, a displacement detection module, a digital-to-analog conversion module, and a high-voltage driving module, which can realize fast and precise tilt control. The method combining the ball lens and the position sensitive sensor is used to measure and control the tilt angle of the precise tilt control platform. Experimental results show that the control precision of the platform is better than 0.5 μrad, and the structure is simple and easy to install. It is especially suitable for engineering application environments that have the requirements of precise tilt control and low cost.