中国激光, 2020, 47 (12): 1201005, 网络出版: 2020-11-17
基于全介质共振域光栅的偏振器件设计与制备 下载: 866次
Design and Fabrication of Polarizer Based on All-Dielectric Resonance-Domain Grating
光学器件 偏振器 绝缘硅片 共振域光栅 透过率 消光比 optical devices polarizer silicon-on-insulator resonance-domain grating transmission extinction ratio
摘要
基于共振域光栅的特性,采用商用绝缘硅片设计并制备了一种用于近红外通信波段的高性能偏振器件。在1.460~1.625μm的波长范围内,利用时域有限差分算法设计了一种周期为0.98μm的全介质共振域光栅,该光栅的消光比最大值为55dB。根据设计结果,采用电子束直写曝光技术对该偏振光栅进行了实验制备,并进行偏振性能测试。结果表明,该光栅的横向磁场偏振光透过率约在80%以上,消光比在20dB以上,最大值可达到32dB,与仿真结果基本一致。相比于传统亚波长金属光栅的周期需要小于1/4入射光波长才能起偏的性质,该偏振光栅在周期为近波长的条件下即有较好的偏振性能,在制备上降低了光刻工艺的难度。此外,该偏振器件是基于商用绝缘硅片制备,与现有的成熟半导体工艺兼容,具有较强的集成性和实用性。
Abstract
Based on the characteristics of resonance-domain grating, a high performance polarizer for near-infrared communication band is designed and fabricated using commercial silicon-on-insulator(SOI). In the wavelength range of 1.460μm to 1.625μm, an all-dielectric resonance-domain grating with a period of 0.98μm is designed by use of finite difference time domain method. The maximum extinction ratio of the grating is up to 55dB. According to the results of the design, the polarization grating is experimentally fabricated by electron beam lithography and the polarization performance of grating is measured. Experimental results show that the transmission of transverse magnetic polarized light of grating exceeds 80%, the extinction ratio of the polarization grating is more than 20dB, and the maximum value can reach up to 32dB, agreeing well with the simulation results. Compared with the polarization characteristics of the traditional sub-wavelength metal grating whose period requires less than a quarter of the incident light wavelength, the polarization grating exhibits good polarization performance with near wavelength grating period, reducing the difficulty of lithography in fabrication. Moreover, the polarizer is fabricated based on commercial SOI, which is compatible with the existing mature semiconductor technology and has strong integration and practicability.
魏张帆, 胡敬佩, 张冲, 董延更, 曾爱军, 黄惠杰. 基于全介质共振域光栅的偏振器件设计与制备[J]. 中国激光, 2020, 47(12): 1201005. Wei Zhangfan, Hu Jingpei, Zhang Chong, Dong Yangeng, Zeng Aijun, Huang Huijie. Design and Fabrication of Polarizer Based on All-Dielectric Resonance-Domain Grating[J]. Chinese Journal of Lasers, 2020, 47(12): 1201005.