基于Zernike相衬法原理和相衬板设计理论,利用金属材料Ag具有宽角度消偏振的特性,设计一种低偏振效应的移相膜。采用光刻及镀膜法,研制了可用于相衬显微镜中的新型结构相衬板。通过控制介质膜和金属膜的物理厚度,分别调节相衬板的相位和透过率,提高相衬度;通过优化光刻及制备薄膜的工艺参数,得到高质量的圆环结构。最终获得振幅透过率为18.03%,相移量为0.49π的相衬板。

Based on the principle of the Zernike phase contrast method and the design theory of the phase contrast plate, the characteristics of the wide angle and depolarization of Ag are used to design a phase-shifting film with low polarization effect. Via photolithography and coating, a phase contrast plate with a novel structure that can be used in the phase contrast microscope is developed. The phase and transmittance of the phase contrast plate are adjusted by controlling the physical thicknesses of the dielectric and metal films, respectively, to improve the phase contrast. A high-quality ring structure is obtained by optimizing the parameters of photolithography and coating. Finally, a phase contrast plate with an amplitude transmittance of 18.03% and a phase shift of 0.49π is obtained.