超构表面由二维平面内精心排布的亚波长单元组成，为设计超紧凑型光学元件提供了新的范式，在微型化光学系统方面显示出了极大的潜力。在不到十年时间里，超构表面由于具有超轻、超薄且能够操纵光波的各种参量以实现多功能集成的优势在多学科领域引起了广泛的关注。然而，在光学波段，高自由度、非周期、排列密集的超构单元对其加工制备提出了很多极端的参数要求，如极小尺度、极高精度、高深宽比、难加工材料、跨尺度等，这使得超构表面从实验室走向实际应用面临极大的挑战。文中总结了近些年用于超构表面各类微纳加工方法的各类方法的原理、特点和最新进展，包括小面积直写方法、大面积模板转移方法以及一些新兴的加工方法。最后，针对超构表面在加工方面的目前的挑战和未来的发展趋势进行了总结和展望。

The metasurface is composed of carefully arranged sub-wavelength units in a two-dimensional plane, which provides a new paradigm for designing ultra-compact optical elements and shows great potential in miniaturizing optical systems. In less than ten years, metasurfaces have caused extensive concern in multidisciplinary fields due to their advantages of being ultra-light, ultra-thin and capable of manipulating various parameters of light waves to achieve multi-functional integration. However, in the optical band, high-degree-of-freedom, aperiodic, and densely arranged metaunits put forward many extreme parameter requirements for fabrication, such as extremely small size, extremely high precision, high aspect ratio, difficult-to-process materials, cross-scale, etc. This poses a great challenge for metasurfaces from laboratory to practical applications. Here, the principles, characteristics and latest developments for micro-nano fabrication of metasurfaces in recent years were summarized, including small-area direct writing methods, large-area template transfer methods, and some emerging fabrication methods. Finally, the current challenges and future development trends of metasurface fabrication were summarized and prospected.