光学学报, 2020, 40 (20): 2005001, 网络出版: 2020-09-30   

制造误差对大尺度超振荡平面透镜聚焦性能的影响 下载: 1286次封面文章

Effect of Manufacturing Errors on Focusing Performance of Large-Scale Super-Oscillatory Lens
作者单位
西安交通大学机械制造系统工程国家重点实验室, 陕西 西安 710049
摘要
针对大尺度超振荡平面透镜(SOL)的实际应用,基于严格的矢量角谱理论定量研究了多种典型制造误差对大尺度SOL聚焦性能的影响规律。理论计算结果表明:横向环带制造误差对振幅型SOL(金属膜)和相位型SOL(介质层)聚焦性能的影响规律基本一致,环带中心位置偏差主要影响SOL的聚焦焦距,环带宽度偏差主要影响SOL的聚焦光斑分布;±150 nm范围内的位置偏差和宽度偏差是大尺度SOL各环带的最大制造允许公差;对于相位型SOL,纵向刻蚀深度偏差主要影响聚焦光斑的强度,π相位差对应的聚焦光斑强度最大;为使相位型SOL聚焦光斑保持较高强度,应使介质层刻蚀深度对应的相位调制量保持在(0.8~1.2)π的范围内。
Abstract
The influence of different manufacturing errors on focusing performance of large-scale super-oscillatory lens (SOL) is revealed through a quantitative study for practical use based on rigorous vector angular spectrum theory. Theoretical calculation results show that the influence of the manufacturing errors on focusing performance of amplitude-type SOL (metallic film) and phase-type SOL (dielectric layer) is the same; central position deviation mainly affects the focusing focal length, while the width deviation mainly influences the focal spot distribution; the position and width deviations within the range of ±150 nm are the maximum allowable manufacturing tolerances for each SOL ring belt. Longitudinal etching depth deviation mainly affects the focused intensity of the phase-type SOL. When the relative phase difference introduced by the etching depth is π, the focused intensity reaches its maximum. To maintain a greater focused intensity, phase modulation should be kept within the range of 0.8π--1.2 π.

何韬, 刘涛, 刘康, 李国卿, 王佳怡, 田博, 杨树明. 制造误差对大尺度超振荡平面透镜聚焦性能的影响[J]. 光学学报, 2020, 40(20): 2005001. Tao He, Tao Liu, Kang Liu, Guoqing Li, Jiayi Wang, Bo Tian, Shuming Yang. Effect of Manufacturing Errors on Focusing Performance of Large-Scale Super-Oscillatory Lens[J]. Acta Optica Sinica, 2020, 40(20): 2005001.

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