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基于短相干技术的光学平板折射率测量方法

Measuring Refractive Index of Transparent Plate by Low-Coherent Interference

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摘要

为测量光学平板玻璃折射率,提出一种改进的基于迈克耳孙原理的折射率测量方法。利用短相干光源的空间相干性,结合距离测量工具,可准确获得光学间隔间的距离。分别测量放入样品前后以及按照一定角度旋转样品后的光学距离,同时利用折射定律,可以计算得到光学平板玻璃的折射率。提出了一种迭代计算方法,不需要直接求解一元四次方程,实现了折射率的快速计算。分析距离和角度测量误差以及样品平行度引入的误差可知,本文方法折射率测量误差优于5×10 -5。与V棱镜折射率测量方法进行比较,结果验证了本文方法的正确性。

Abstract

In order to measure the refractive index of transparent plate, an improved method based on the Michelson principle is proposed. Using the spatial coherence of low-coherent light sources and distance measurement tools, the distance between optical intervals can be accurately obtained. The optical distances before and after placing the sample and after rotating the sample at a certain angle are measured, respectively. Hence, the refractive index of the optical glass plate can be calculated by using the law of refraction. An iterative algorithm is proposed to avoid directly solving the quaternary equation of one variable and realize fast calculation of the refractive index. By analyzing the measurement errors of distance, angle, and parallelism of the sample, it is found that the refractive index measurement error of the proposed method is better than 5×10 -5. The comparison result with the V-prism refractive index measurement method verifies the correctness of the proposed method.

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DOI:10.3788/CJL201946.0804004

所属栏目:测量与计量

基金项目:中国工程物理研究院项目;

收稿日期:2019-02-27

修改稿日期:2019-04-19

网络出版日期:2019-08-01

作者单位    点击查看

高波:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
李强:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
刘昂:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
柴立群:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900

联系人作者:高波(48491061@qq.com)

备注:中国工程物理研究院项目;

【1】Shumate M S. Interferometric measurement of large indices of refraction. Applied Optics. 5(2), 327-331(1966).

【2】Rosfjord K, Chang C, Miyakawa R et al. Direct index of refraction measurements at extreme-ultraviolet and soft-X-ray wavelengths. Applied Optics. 45(8), 1730-1735(2006).

【3】Gillen G D and Guha S. Use of Michelson and Fabry-Perot interferometry for independent determination of the refractive index and physical thickness of wafers. Applied Optics. 44(3), 344-347(2005).

【4】Tan T Y, Yi K and Shao J D. Measurement of refractive index of the optical crystal with spectrophotometer. Chinese Journal of Lasers. 32(12), 1678-1682(2005).
谭天亚, 易葵, 邵建达. 利用分光光度计测量光学晶体的折射率. 中国激光. 32(12), 1678-1682(2005).

【5】Meng Q H and Xiang Y. Novel high accurate measurement method for refractive index of optical glass. Optics and Precision Engineering. 16(11), 2114-2119(2008).
孟庆华, 向阳. 高精度测量光学玻璃折射率的新方法. 光学精密工程. 16(11), 2114-2119(2008).

【6】Song D S, Wang L, Xu R G et al. Refractive index measurement for quartz glass in ultraviolet band. Journal of Applied Optics. 32(4), 705-708(2011).
宋冬生, 王雷, 许荣国 等. 石英玻璃紫外波段折射率测量. 应用光学. 32(4), 705-708(2011).

【7】Sun G L. A new refractive index measuring method. Journal of Applied Optics. 16(1), 58-61(1995).
孙桂林. 一种折射率测量新方法. 应用光学. 16(1), 58-61(1995).

【8】Wei R X and Jiang D S. Refractive index measurement with Fabry-Perot interference wavelength. Chinese Journal of Lasers. 30(6), 551-554(2003).
魏仁选, 姜德生. 基于F-P干涉波长的折射率测量. 中国激光. 30(6), 551-554(2003).

【9】Choi H J, Lim H H, Moon H S et al. Measurement of refractive index and thickness of transparent plate by dual-wavelength interference. Optics Express. 18(9), 9429-9434(2010).

【10】Gillen G D and Guha S. Refractive-index measurements of zinc germanium diphosphide at 300 and 77 K by use of a modified Michelson interferometer. Applied Optics. 43(10), 2054-2058(2004).

【11】Hao D Z, Wu F Q and Kong W J. Measurement of refractive index of crystals with interferometry. Laser Technology. 27(5), 407-408(2003).
郝殿中, 吴福全, 孔伟金. 干涉法测量晶体的折射率. 激光技术. 27(5), 407-408(2003).

【12】Xiong F, Hu Z W and Jiang M D. Non-contact measurement of refractive index based on parallel surface plate. Journal of Applied Optics. 33(1), 148-152(2012).
熊芬, 胡中文, 姜明达. 基于平行平板的折射率高精度非接触测量. 应用光学. 33(1), 148-152(2012).

【13】Xue H, Shen W D, Gu P F et al. Thickness measurement of thin film based on white-light spectral interferometry. Acta Optica Sinica. 29(7), 1877-1880(2009).
薛晖, 沈伟东, 顾培夫 等. 基于白光干涉的光学薄膜物理厚度测量方法. 光学学报. 29(7), 1877-1880(2009).

【14】Ma Y, Chen L, Zhu W H et al. Dynamic Twyman interferometer for phase defect measurement. Chinese Journal of Lasers. 44(12), (2017).
马云, 陈磊, 朱文华 等. 用于相位缺陷检测的动态泰曼干涉仪. 中国激光. 44(12), (2017).

【15】Deng Q Y, Tang Y, Zhou Y et al. High-resolution surface topography measurement based on frequency-domain analysis in white light interferometry. Chinese Journal of Lasers. 45(6), (2018).
邓钦元, 唐燕, 周毅 等. 基于白光干涉频域分析的高精度表面形貌测量. 中国激光. 45(6), (2018).

引用该论文

Bo Gao, Qiang Li, Ang Liu, Liqun Chai. Measuring Refractive Index of Transparent Plate by Low-Coherent Interference[J]. Chinese Journal of Lasers, 2019, 46(8): 0804004

高波, 李强, 刘昂, 柴立群. 基于短相干技术的光学平板折射率测量方法[J]. 中国激光, 2019, 46(8): 0804004

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