设计了一种基于Fano共振的等离子体折射率纳米传感器,传感器由带存根谐振腔的直波导耦合开口方环谐振器组成。使用有限元分析法研究了该传感器结构的传输特性,并分析了结构参数对系统传感特性的影响。计算结果表明该结构可以激发Fano共振,且共振峰的位置和线型可以通过改变关键参数进行调节。通过调整结构参数,该结构的灵敏度值可以达到1125.7 nm/RIU,品质因数为30.01。该结构在光学集成回路方面具有潜在的应用前景,尤其是在纳米生物传感器方面。

A plasma refractive index nanosensor based on Fano resonance is designed, which is composed of the metal-insulator-metal waveguide with a stub coupled with a split-square resonator. Analysis of transmission characteristics of the sensor's structure is performed using the finite element method, and the influences of the structural parameters on the sensing characteristics of the sensor are studied. The calculated results show that the structure can excite the Fano resonance, and the resonance peak wavelength and line type can be adjusted by changing the key parameters. By adjusting the structural parameters, the sensitivity of the structure is up to 1125.7 nm/RIU and the figure of merit is 30.01. The results indicate that the proposed structure can be applied to optical integrated circuits, especially in nanometer biosensors.