We report on the elemental redistribution behavior in oxyfluoride glasses with a high repetition rate near-infrared femtosecond laser. Elemental analysis by an electro-probe microanalyzer demonstrates that the redistributions of Ca²⁺ and Yb³⁺ ions change dramatically with pulse energy, which are quite different compared with previous reported results. Confocal fluorescence spectra of Yb³⁺ ions demonstrate that the luminescence intensity changes obviously with the elemental redistribution. The mechanism of the observed phenomenon is discussed. This observation may have potential applications in the fabrication of micro-optical devices.