激光与光电子学进展, 2020, 57 (23): 231404, 网络出版: 2020-11-25   

基于CO2激光加工的法布里-珀罗光学微腔阵列的制备 下载: 928次

Fabrication of Fabry-Pérot Optical Microcavity Array Based on CO2 Laser Processing
作者单位
太原理工大学新型传感器与智能控制教育部重点实验室,山西 太原 030024
摘要
主要研究了基于CO2激光微加工实现法布里-珀罗(FP)光学微腔阵列的制备。首先,通过CO2激光微加工和掩模板相结合的方法,在玻璃基底上制备了阵列型的凹面结构,并对结构的特性进行了分析。测量及模拟分析结果表明,凹面结构可近似为高斯曲面,深度范围为0.042~0.64 μm,半峰全宽范围为11.30~16.60 μm;结构底部可近似为球面。随后,通过镀介质膜和微腔封装,制备了FP微腔阵列,采用平面镜-凹面镜的微腔组装形式,形成FP稳定腔。最后,测试了微腔阵列中光微流激光的产生。
Abstract
The main research is to realize the fabrication of Fabry-Pérot(FP) optical microcavity array based on CO2 laser processing. Firstly, by combining CO2 laser micromachining and mask, an array-type concave structure was prepared on the glass substrate, and the characteristics of the structure were analyzed. Measurement and simulation analysis results show that the concave structure can be approximated to a Gaussian surface with depth ranging from 0.042 μm to 0.64 μm and full width at half maximum height ranging from 11.30 μm to 16.60 μm, the bottom of the structure can be approximated as a spherical surface. Secondly, FP microcavity array was prepared by dielectric coating and microcavity assembly, using a flat mirror-concave mirror microcavity assembly form to form an FP stable cavity. Finally, the generation of optofluidic laser in the FP microcavity array was realized.

贾卓楠, 张婷婷, 栗正华, 花双全, 王文杰. 基于CO2激光加工的法布里-珀罗光学微腔阵列的制备[J]. 激光与光电子学进展, 2020, 57(23): 231404. Zhuonan Jia, Tingting Zhang, Zhenghua Li, Shuangquan Hua, Wenjie Wang. Fabrication of Fabry-Pérot Optical Microcavity Array Based on CO2 Laser Processing[J]. Laser & Optoelectronics Progress, 2020, 57(23): 231404.

本文已被 2 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!