研究了一种太赫兹光调制超材料传感器。该器件由金属-半导体复合结构（开口谐振环（SRR））和柔性聚酰亚胺衬底组成。光敏硅材料填充在器件上方的两个开口处。模拟结果表明，通过改变外激励泵浦光的功率，光敏硅的电导率发生改变，从而实现对复合超材料结构谐振峰的调制。进一步分析该结构在谐振频率下的电场和表面电流密度分布情况，讨论了其物理机制。此外，随着待测溶液（氯化钙）浓度变化，传感器谐振峰发生红移，其灵敏度为11.4 GHz/M。该器件可作为太赫兹波段液体传感器使用。

A terahertz photo-excited tunable metamaterial sensor is investigated. It is composed of a hybrid metal-semiconductor structure (which is a split ring resonator (SRR)) and a flexible polyimide substrate. Silicon is filled in the gaps of the structure. Simulation results reveal that the conductivity of the semiconductor component can be tuned by changing the external pump light’s power, resulting in resonant peak shift of the composited metamaterial structure. The electric field and surface current density distributions of this structure under different resonant frequencies are also analyzed. The physical mechanism of this device has been further discussed. Moreover, the resonant peak will be red-shift as the concentration of the surrounding environment (calcium chloride, CaCl₂) increases, and the sensitivity is 11.4 GHz/M, which makes it a possible application in liquid sensing in terahertz region.