通过对激光作用薄膜元件后的损伤过程和图像损伤特征进行分析与研究,借助光学薄膜损伤表面三维微观形貌的重构,揭示薄膜元件损伤机理。基于白光干涉显微原理,采集薄膜损伤表面的干涉显微三维云数据,运用Delaunay三角剖分法构建损伤表面的三角网格模型,通过可视化仿真,实现了损伤表面三维微观形貌的再现。结果表明:实验测试的HfO2薄膜表面损伤区域呈坑状凹陷,损伤形貌不规则,内部有鼓包、裂纹存在,边缘处陡度变化大、毛刺较多;对重构图像、VEECO Vision软件处理结果、Taylor-Hobson非接触式轮廓仪测试结果进行对比后发现,重构图像能更直观、全方位地再现损伤表面细微形貌。研究结果给分析损伤表面形貌特征、调控高损伤阈值薄膜制备工艺提供了技术支持。

In this study, the damage mechanism of thin film components is revealed by reconstructing the three-dimensional (3D) micro-morphology of a damaged optical film surface and by analyzing and studying the damage process and image damage characteristics of thin film components after laser irradiation. The interference microscopic 3D cloud data of the damaged thin film surface is collected based on the principle of white light interference microscopy. The triangular mesh model of the damaged surface is constructed using the Delaunay triangulation method. Moreover, the 3D micro-topography of the damaged surface is reproduced through a visual simulation. The results show that the surface damage areas of HfO₂ films tested in the experiments are pit-shaped. The damage morphology is irregular (i.e., many bulges and cracks exist inside). In addition, the edge steepness greatly changes, and more burrs are observed. Compared with the reconstructed image, processing results of the VEECO Vision software, and test results of the Taylor-Hobson non-contact profiler, the reconstructed image can more intuitively and comprehensively reproduce the micro-morphology of a damaged surface. The results provide technical support for analyzing the morphology of the damaged surface and controlling the preparation process of films with high-damage threshold.