强激光与粒子束, 2020, 32 (5): 051001, 网络出版: 2020-04-24   

基于相机阵列的光学组件缺陷在线检测方法

Optical elements defect online detection method based on camera array
作者单位
中国科学院 光束控制重点实验室,成都 610209;中国科学院 光电技术研究所,成都 610209;中国科学院大学,北京 100049
摘要
利用调焦方式可以实现焦距的连续变化从而对不同物距下的光学组件进行在线检测,但是调焦过程操作复杂且对调焦位移精度要求较高,景深内光学元件缺陷无法区分,难以实现真正意义上的在线检测。因此,本文提出了基于相机阵列的光学组件缺陷在线检测方法。首先建立了相机阵列的成像模型并给出了数字重聚焦表达式以及空间分辨率的表达式。接着利用MATLAB模拟相机阵列成像过程和数字重聚焦过程。最后进行实验验证,通过二维位移台带动相机对不同物距下的多个光学元件表面缺陷进行成像获得阵列相机图像,通过数字重聚焦算法得到不同物距下的光学元件表面缺陷分布信息。实验结果表明,基于相机阵列的光学组件缺陷在线检测技术能够同时对位于景深范围内的光学组件进行在线检测。该方法在光学元件缺陷在线检测方面有着一定的应用价值。
Abstract
The focusing method can be used to achieve continuous change of the focal length, so that the optical components at different object distances can be detected online. However, the focusing process is complicated and requires high accuracy of the focusing displacement. Defects of optical components within the depth of field cannot be distinguished, making it difficult to achieve real online detection. Therefore, this paper proposes an online detection method for optical component defects based on camera arrays. First, the imaging model of the camera array is established, and the expressions of digital refocusing and the expressions of spatial resolution are given. Then MATLAB is used to simulate the camera array imaging process and digital refocusing process. Finally, experimental verification was conducted. The camera was driven by a two-dimensional stage to image the surface defects of multiple optical elements at different object distances, and an array camera image was obtained. The digital defect refocusing algorithm was used to obtain the surface defect distribution of optical elements at different object distances information. The experimental results show that the online detection technology of optical component defects based on camera array can simultaneously detect the optical components located in the depth of field range. This method has certain application value in the online detection of optical component defects.

张文学, 王继红, 任戈. 基于相机阵列的光学组件缺陷在线检测方法[J]. 强激光与粒子束, 2020, 32(5): 051001. Wenxue Zhang, Jihong Wang, Ge Ren. Optical elements defect online detection method based on camera array[J]. High Power Laser and Particle Beams, 2020, 32(5): 051001.

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