从理论和实验上研究了多层介质膜光栅掩膜特性,用严格耦合波(RCW)法对由光栅掩膜槽形和多层膜介质基底引起的衍射效率的变化进行了理论分析,计算得出不同形貌下的光栅掩膜的反射0级光谱衍射效率分布。在实验检测方法上,采用了0级反射光衍射效率分布来进行槽形判断,并将实验结果和理论计算进行了对比。结果证明使用该方法研究光栅掩膜形貌在一定程度上是有效的。

The fabrication of multilayer dielectric gratings was theoretically and experimentally investigated. The rigorous coupled-wave (RCW) method was adopted to analyze the influence of gratings profile and multilayer dielectric stack on the diffraction efficiency. The spectral distributing of the zero order diffraction efficiency was used to judge the gratings profile. Detecting experiments have been conducted to compare the theoretical analyses, the results of this comparison may be helpful to instruct the detection of the gratings profile. This method was proved to be effective to detect the grating mask profile.