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利用严格耦合波方法研究多层介质膜光栅掩膜特性

Study on the Characteristics of Multilayer Dielectric Grating Profile by the Rigorous Coupled-Wave Method

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摘要

从理论和实验上研究了多层介质膜光栅掩膜特性,用严格耦合波(RCW)法对由光栅掩膜槽形和多层膜介质基底引起的衍射效率的变化进行了理论分析,计算得出不同形貌下的光栅掩膜的反射0级光谱衍射效率分布。在实验检测方法上,采用了0级反射光衍射效率分布来进行槽形判断,并将实验结果和理论计算进行了对比。结果证明使用该方法研究光栅掩膜形貌在一定程度上是有效的。

Abstract

The fabrication of multilayer dielectric gratings was theoretically and experimentally investigated. The rigorous coupled-wave (RCW) method was adopted to analyze the influence of gratings profile and multilayer dielectric stack on the diffraction efficiency. The spectral distributing of the zero order diffraction efficiency was used to judge the gratings profile. Detecting experiments have been conducted to compare the theoretical analyses, the results of this comparison may be helpful to instruct the detection of the gratings profile. This method was proved to be effective to detect the grating mask profile.

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中图分类号:O 436.1

所属栏目:测量与计量

基金项目:国家863计划(2004AA849023)资助项目。

收稿日期:2004-09-16

修改稿日期:2004-12-16

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作者单位    点击查看

万华:苏州大学信息光学工程研究所,江苏 苏州 215006
陈新荣:苏州大学信息光学工程研究所,江苏 苏州 215006
吴建宏:苏州大学信息光学工程研究所,江苏 苏州 215006

联系人作者:万华(dywanhua@163.com)

备注:万华(1979—),男,江苏丹阳人,苏州大学信息光学工程研究所硕士研究生,主要从事衍射光学元件的研究。

【1】Wang Zhongyang, Xu Zhizhan. Study of grating pulse compression in the case of finite beam size [J]. Acta Optica Sinica, 2000, 20(2):151~159
王中阳,徐至展. 有限束宽下光栅对压缩的理论研究[J]. 光学学报, 2000, 20(2):151~159

【2】Li Chuandong, Zhang Zhengquan, Xu Zhizhan. Width limitation of compressed pulse in chirped-pulse amplification [J]. Acta Optica Sinica, 1996, 16(8):1077~1081
李传东,张正泉,徐至展. 啁啾脉冲放大中的脉宽限制[J]. 光学学报, 1996, 16(8):1077~1081

【3】Wang Tao, Fan Dianyuan. Dynamics study for high power laser amplifier [J]. Acta Optica Sinica, 1999, 19(4):468~473
王韬,范滇元. 高功率激光放大器动力学的理论研究[J]. 光学学报, 1999, 19(4):468~473

【4】Lu Xingqiang, Qian Liejia, Fan Dianyuan. Theory and simulation of amplified pulses from chirped-pulse laser amplifier [J]. Chinese J. Lasers, 2002, A29(10):882~884
卢兴强,钱列加,范滇元. 啁啾脉冲激光放大器输出光束时间特性的理论和数值模拟[J]. 中国激光, 2002, A29(10):882~884

【5】Xu Guang, Qian Liejia, Fan Dianyuan. Optimization of the single-grating stretcher in chirped-pulse amplification [J]. Chinese J. Lasers, 2002, A29(12):1067~1070
徐光,钱列加,范滇元. 啁啾脉冲放大系统中单光栅展宽器的优化[J]. 中国激光, 2002, A29(12):1067~1070

【6】M. D. Perry, R. D. Boyd, J. A. Britten et al.. High-efficiency multilayer dielectric diffraction gratings [J]. Opt. Lett., 1995, 20(8):940~942

【7】B. W. Shore, M. D. Perry, J. A. Britten et al.. Design of high-efficiency dielectric reflection gratings [J]. J. Opt. Soc. Am. A, 1997, 14(5):1124~1136

【8】Karl Hehl, Joerg Bischoff, Ullrich Mohaupt et al.. High-efficiency dielectric reflection gratings: design, fabrication, and analysis [J]. Appl. Opt., 1999, 38(30):6257~6271

【9】M. G. Moharam, T. K. Gaylord. Rigorous coupled-wave analysis of planar-grating diffraction [J]. J. Opt. Soc. Am., 1981, 71(7):811~818

【10】M. G. Moharam, T. K. Gaylord. Diffraction analysis of dielectric surface-relief gratings [J]. J. Opt. Soc. Am., 1982, 72(10):1385~1392

【11】M. G. Moharam, Eric B. Grann, Drew A. Pommet et al.. Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings [J]. J. Opt. Soc. Am. A, 1995, 12(5):1068~1076

【12】M. G. Moharam, Drew A. Pommet, Eric B. Grann et al.. Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach [J]. J. Opt. Soc. Am. A, 1995, 12(5):1077~1086

【13】M. G. Moharam, T. K. Gaylord. Rigorous coupled-wave analysis of metallic surface-relief gratings [J]. J. Opt. Soc. Am. A, 1986, 3(11):1780~1787

【14】Liang Quanting. Physical Optics[M]. Beijing: Mechanical Industry Press, 1987
梁铨廷. 物理光学[M]. 北京:机械工业出版社, 1987

引用该论文

万华,陈新荣,吴建宏. Study on the Characteristics of Multilayer Dielectric Grating Profile by the Rigorous Coupled-Wave Method[J]. Chinese Journal of Lasers, 2005, 32(9): 1275-1280

万华,陈新荣,吴建宏. 利用严格耦合波方法研究多层介质膜光栅掩膜特性[J]. 中国激光, 2005, 32(9): 1275-1280

被引情况

【1】陈刚,吴建宏,陈新荣,刘全. 镀铬基片全息光栅光刻胶掩模槽形参量光谱检测方法. 中国激光, 2006, 33(6): 800-804

【2】梁桂荣,陶纯匡. 二步法大景深反射全息图. 光学学报, 2007, 27(12): 2139-2142

【3】陈刚,吴建宏,刘全. 镀铬对光刻胶全息光栅掩模槽形的影响. 光学仪器, 2007, 29(6): 81-84

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