利用宽角光束传输法(WA-BPM)对二氧化硅平面波导环形谐振腔进行了优化设计,详细分析了不同环形腔长度下,谐振腔清晰度与环形腔耦合器耦合系数的关系,并进一步分析了由光探测器散弹噪声所限制的谐振型光学陀螺极限灵敏度和环形腔光路参量之间的关系。在此基础上,在硅衬底上利用火焰水解化学掺GeO2的二氧化硅波导上制作成带输入/输出耦合器的环形谐振腔芯片。并通过实验测试了所研制的光波导环形谐振腔,其清晰度高达60,理论分析表明采用上述环形谐振腔研制的陀螺,其极限灵敏度可达1°/h。

Optical ring resonator is the key sensing unit of resonator micro optic gyro. Improving the finesse of the ring resonator is the key technique to improve the resonator micro optic gyro. This paper presents optimal design of ring resonator in silica optical waveguide using wide angle beam propagation method (WA-BPM). The results are applied to the investigation of influence of coupling coefficient of the coupler in the resonator on resonator finesse under some resonator length. Furthermore, analysis has been made of relationship between the shot-noise-limited sensitivity of resonator optic gyro and optical parameters in ring resonator. Then the ring resonator chip including input and output couplers is fabricated on GeO2-doped silica waveguides by flame hydrolysis deposition method. Measurements show the finesse of the resonator is as high as 60. Theoretical analysis predicts that the sensitivity of 1 degree/hour performance for the resonator micro optic gyros based on this resonator can be achieved.