Chinese Optics Letters, 2013, 11 (5): 053003, Published Online: Apr. 16, 2013   

Experimental study of Fourier transform spectrometer based on MEMS micro-mirror Download: 869次

Author Affiliations
Abstract
We propose a new Fourier transform spectrometer based on programmable microelectromechanical systems (MEMS) micro-mirror and an improved Michelson interferometer. The principle of the spectrometer is theoretically analyzed. A signal acquisition unit and an experimental set-up are designed. The spectrum of the polychromatic light source is obtained at a slantwise reflector angle of 0.238o. The spectrum is analyzed by this system within the near infrared. The experimental results show that the spectral accuracy is less than 3 nm, and the signal-to-noise ratio (SNR) is 18 dB. The spectral resolution is less than 16 nm.
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Jianjun Chen, Yong Zhu, Bo Liu, Wei Wei, Ning Wang, Jie Zhang. Experimental study of Fourier transform spectrometer based on MEMS micro-mirror[J]. Chinese Optics Letters, 2013, 11(5): 053003.

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