红外与激光工程, 2007, 36 (3): 329, 网络出版: 2007-09-18  

非晶硅室温微测辐射热计的研制

A-Si:H room temperature microbolometer
作者单位
清华大学,微电子学研究所,北京,100084
摘要
将聚酰亚胺作为绝热材料,对传统室温微测辐射热计结构进行了改进,成功制备了非晶硅室温微测辐射热计并进行了测试.以聚合物材料作为绝热材料,避免了表面牺牲层工艺和体加工技术,降低了成本、提高了成品率.在传统探测器结构基础上,在底部制备一层金属用作红外反射层.利用吸收层可以对红外辐射进行二次吸收.金属层和有源层间的隔离层对红外也有很好的吸收效果,由隔离层、有源层和钝化层构成三明治结构,可以显著改善对红外辐射的吸收.对器件的制备工艺进行了说明并对器件特性进行了测试,结果表明,在773 K黑体源8~14 μm红外辐射下,探测器的响应度最大为26.4 kV/W,表明器件具有较高的性能.
Abstract
参考文献

[1] CHEN Shi,ZHANG Hai -1bo,JIANG Sheng-lin,et al.Status and trend of pyroelectric uncooled infrared focal plane arrays[J].Infrared and Laser Engineering(陈实,张海波,姜胜林,等.热释电非制冷红外焦平面现状及发展趋势.红外与激光工程),2006,35(4):419-436.

[2] WOOD R A.High-performance infrared thermal imaging with monolithic silicon focal planes operating at room temperature[J].IEDM Tech Dig,1993:175-177.

[3] DONG Liang,YUE Rui-feng,LIU Li-tian.An uncooled microbolometer infrared detector based on poly-SiGe thermistor[J].Sensors and Actuators,2003,105(3):286-292.

[4] ZENG W J,KARUNASIRI G,CHUA S J.Fabrication of microbolometer infrared focal plane array[C]//Proceeding of MINDEF-NUS Jiont R &D Seminar,1997,8:148-151.

[5] LEE H K,YOON J B,YOON E,et al.A high fill-factor Infrared bolometer using micromachined multilevel electrothermal structure[J].IEEE Transaction on Electron Deviges,1999,46(7):1489-1492.

[6] NODA M,HASHIMOTO K,KUBO R,et al.A new type of dielectric bolometer mode of detector pixel using ferroelectrics thin film capacitors for infrared image sensor[J].Sensors and Actuators A,1999,77:39-44.

[7] DONG L,YUE R F,LIU L T,et al.Freestanding a-Si thin film transistor for room-temperature infrared detection[J].Chinese Phys Lett,2004,21(2):262-265.

[8] LIDDIARD K C.Thin film resistance bolometer IR detectors[J].Infrared Phy,1984,24:57-61.

[9] LEE H K,YOON J B,YOON E,et al.A high fill-factor Infrared bolometer using micromachined multilevel electrothermal structures[J].IEEE Transaction on Electron Devices,1999,46(7):1489-1491.

[10] IGNATIEV A,XU Y Q,WU N J,et al.Pyroelectric,ferroelectric and dielectric properties of Mn and Sb-doped PZT thin films for uncooled IR detectors[J].Materials Science and Engineering B.1998,56:191-194.

[11] LIU Xi-ding,JIANG Mei qing,FENG Xiao-mei,et al.Research on uncooled infrared microbolometer[J].Journal of Infrared and Millimeter Waves(刘西钉,姜美玲,冯晓梅,等.非制冷红外微测辐射热计的研制.红外与毫米波学报),1997,16(6):459-462.

刘兴明, 韩琳, 刘理天. 非晶硅室温微测辐射热计的研制[J]. 红外与激光工程, 2007, 36(3): 329. 刘兴明, 韩琳, 刘理天. A-Si:H room temperature microbolometer[J]. Infrared and Laser Engineering, 2007, 36(3): 329.

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