中国激光, 2008, 35 (6): 916, 网络出版: 2008-06-06   

光学薄膜界面粗糙度互相关特性与光散射 下载: 2160次

Optical Thin Films Interfaces Roughness Cross-Correlated Properties and Light Scattering
作者单位
1 西安工业大学光电工程学院, 陕西 西安 710032
2 西安电子科技大学理学院,陕西 西安 710071
摘要
为了研究光学薄膜界面的互相关特性及光散射特性,介绍了光学薄膜的散射理论和模型。依据光学薄膜矢量散射的表达式,借助于总背向散射理论分析了光学薄膜界面互相关特性对光散射的影响,并用实验验证和分析了TiO2单层薄膜膜层厚度,K9玻璃基底粗糙度以及离子束辅助沉积(IBAD)工艺等因素对光学薄膜界面互相关特性的影响。结果表明,根据矢量光散射理论计算的光学薄膜界面互相关特性和光散射的关系与实验测量结果一致。随着基底粗糙度、薄膜光学厚度的增加,薄膜界面的互相关特性会变差,采用离子束辅助沉积的TiO2单层薄膜的膜层界面互相关性明显好于不用离子束辅助沉积的薄膜。
Abstract
In order to study cross correlated properties and light scattering of optical thin films interfaces roughness, the theoretical models of optical thin films interfaces roughness light scattering were concisely presented. Furthermore, based on the expression of vectorial scattering of optical films, influence of interfaces roughness cross-correlated properties on light scattering was analyzed by total backscattering theory. Moreover, effects of TiO2 single optical films thickness, substrate roughness of K9 glass and ion beam assisted deposition (IBAD) technique on interface roughness cross correlated properties were studied by experiments, respectively. The results show that theoretical results obtained by integrating vector light scattering are agreement well with experimental results. With the increase of films thickness and substrates roughness, the interfaces roughness cross-correlated properties decrease. When ion beam assisted deposition is used, a high degree of cross-correlated properties can be observed.
参考文献

[1] . Haelbich, A. Segmiiller. Smooth multilayer films suitable for X-ray mirrors[J]. Appl. Phys. Lett., 1979, 34(3): 184-186.

[2] Xu Changshan, Gong Yan, Xiang Yang et al.. Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface[J]. Optics and Precision Engineering, 2002, 10(1):45~49
徐长山,巩岩,向阳 等. 表面轮廓仪传递函数对超光滑表面粗糙度测量的影响[J]. 光学精密工程, 2002, 10(1):45~49

[3] Hou Haihong, Hong Ruijin, Zhang Dongping et al.. Total integrated scatterometer for measuring the microroughness of optical thin films[J]. Chinese J. Lasers, 2005, 32(9):1258~1261
侯海虹,洪瑞金,张东平 等. 测量薄膜微粗糙度的总积分散射仪[J]. 中国激光, 2005, 32(9):1258 ~1261

[4] . Grèzes-Besset, L. Bruel. Comparison of surface and bulk scattering in optical multilayers[J]. Appl. Opt., 1993, 32(28): 5492-5503.

[5] Wang Yinglong, Zhang Rongmei, Fu Guangsheng et al.. Influence of inert gas pressure on the surface roughness of silicon film prepared by pulsed laser deposition[J]. Chinese J. Lasers, 2004, 31(6):698~700
王英龙,张荣梅,傅广生 等. 环境气压对脉冲激光烧蚀沉积纳米Si薄膜表面粗糙度的影响[J]. 中国激光, 2004, 31(6):698~700

[6] Hou Haihong, Fan Zhengxiu, Shao Jianda et al.. Scalar scattering theory of optical surfaces[J]. Laser & Optoelectronics Progress, 2005, 42(11):35~38
侯海虹,范正修,邵建达 等. 光学表面的标量散射理论[J]. 激光与光电子学进展, 2005, 42(11):35~38

[7] Hou Haihong, Shen Jian, Shen Zicai et al..Stratified-interface scattering model for multilayer optical coatings[J]. Acta Optica Sinica, 2006, 26(7):1102~1106
侯海虹,沈健,沈自才 等. 光学薄膜的分层界面散射模型[J]. 光学学报, 2006, 26(7):1102~1106

[8] . Amra, G. Albrand, P. Roche. Theory and application of antiscattering single layers:antiscattering antireflection coatings[J]. Appl. Opt., 1986, 25(16): 2695-2702.

[9] . Roche, P. Bousquet, F. Flory et al.. Determination of interface roughness cross-correlated properties of an optical coating from measurements of the angular scattering[J]. J. Opt. Soc. Am. A, 1984, 1(10): 1208-1230.

[10] Zhan Yuanling, Wang Li. Determination of interface cross-correlation properties of optical coatings[J]. Acta Optica Sinica, 1989, 9(7):635~639
战元龄,王立. 光学薄膜界面互相关特性的确定[J]. 光学学报, 1989, 9(7):635~639

[11] . M. Elson. Theory of light scattering from a rough surfaces with an inhomogeneous dielectric permittivity[J]. Phys. Rev. B, 1984, 30(10): 5460-5480.

[12] . Bousquet, F. Flory, P. Roche. Scattering from multilayer thin films: theory and experiment[J]. J. Opt. Soc. Am., 1981, 71(9): 1115-1123.

[13] . Amra. Light scattering from multilayer optics. Ⅰ. Tools of investigation[J]. J. Opt. Soc. Am. A, 1994, 11(1): 197-210.

潘永强, 吴振森, 杭凌侠. 光学薄膜界面粗糙度互相关特性与光散射[J]. 中国激光, 2008, 35(6): 916. Pan Yongqiang, Wu Zhensen, Hang Lingxia. Optical Thin Films Interfaces Roughness Cross-Correlated Properties and Light Scattering[J]. Chinese Journal of Lasers, 2008, 35(6): 916.

本文已被 21 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!