In this paper, we reported the preliminary results of an integrating periodically capacitive-loaded travelling wave electrode (CL-TWE) Mach-Zehnder modulator (MZM) based on InP-based multiple quantum well (MQW) optical waveguides. The device configuration mainly includes an optical Mach-Zehnder interferometer (MZI), a direct current (DC) electrode, two phase electrodes and a CL-TWE consisting of a U-electrode and an I-electrode. The modulator was fabricated on 3-inches InP epitaxial wafer by standard photolithography, ICP dry etching, wet etching, electroplating and etc. Measurement results show that the MZM exhibits a 3 dB electro-optic bandwidth of about 31 GHz, a Vπ of 3 V, and an extinction ratio of about 20 dB.
