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Low-frequency acoustic Fabry-Pérot fiber sensor based on micromachined silicon nitride membrane [Early Posting]

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摘要

In this letter, a low-frequency acoustic sensor based on extrinsic Fabry-Pérot (FP) interferometer with silicon nitride (Si3N4) membrane is demonstrated. Using micromachining techniques, the 800 nm thick Si3N4 membrane is deposited on a 8 mm×8 mm×400 μm silicon (Si) substrate. All the assembly procedures of the sensor are focused on the substrate to avoid any damage to the membrane itself, compared to general membrane transfer methods. The frequency response of the proposed sensor is discussed theoretically and experimentally demonstrated. The sensor performs an excellent flat response to the tested acoustic frequency range of 1 Hz to 250 Hz. The phase sensitivity is around -152 dB re. 1 rad/μPa with sensitivity fluctuation less than 0.8 dB. The frequency response characteristic shows a promising potential of the sensor in low frequency acoustic signal sensing applications.

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作者单位:

    Huazhong University of Science and Technology
    Huazhong University of Science and Technology
    Huazhong University of Science and Technology
    Huazhong University of Science and Technology
    Huazhong University of Science and Technology

引用该论文

Qu Zhiyuan,Lu Ping,Li Yujian,Fu Xin,Zhang Wanjin,Liu Deming,Zhang Jiangshan. Low-frequency acoustic Fabry-Pérot fiber sensor based on micromachined silicon nitride membrane[J].Chinese Optics Letters,2020,18(10):10.