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Study on Fabrication of Diamond Ultra-fine Structures by Femtosecond Laser [Early Posting]

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摘要

A 400 nm femtosecond laser was used to ablate the surface of HPHT diamond, and the subwavelength surface microstructures with a period of 100 nm were achieved. A variety of micro-nano composite surface structures were prepared by changing the polarization direction and laser scanning direction. By dynamically adjusting the laser polarization and the laser scanning tracks, a maskless direct writing fabrication of micro-nano complex structures was realized. The micro-nano patterning on ultra-hard and super-stability diamond provides a new idea for the preparation of friction reducing surfaces, nano imprint transfer templates, SERS test substrates, and micro-nano optical structures.

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作者单位:

    吉林大学物理学院
    College of Electronic Science and Engineering

引用该论文

Tong Jiang,Si Gao,ZhenNan Tian,Zhang Hanzhuang,LiGang Niu. Study on Fabrication of Diamond Ultra-fine Structures by Femtosecond Laser[J].Chinese Optics Letters,2020,18(10):10.