Chinese Optics Letters, 2021, 19 (6): 060002, Published Online: Mar. 26, 2021  

High-quality-factor optical microresonators fabricated on lithium niobate thin film with an electro-optical tuning range spanning over one free spectral range [Invited] Download: 706次

Author Affiliations
1 State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-intense Laser Science, Shanghai Institute of Optics and Fine Mechanics (SIOM), Chinese Academy of Sciences (CAS), Shanghai 201800, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 School of Physical Science and Technology, ShanghaiTech University, Shanghai 200031, China
4 State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Shanxi University, Taiyuan 030006, China
5 Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
6 The Extreme Optoelectromechanics Laboratory (XXL), School of Physics and Electronic Science, East China Normal University, Shanghai 200241, China
7 Department of Electrical and Computer Engineering, University of Victoria, Victoria BC V8P 5C2, Canada
Abstract
We demonstrate high-quality (intrinsic Q factor ∼2.8 × 106) racetrack microresonators fabricated on lithium niobate thin film with a free spectral range (FSR) of ∼86 pm. By integrating microelectrodes alongside the two straight arms of the racetrack resonator, the resonance wavelength around 1550 nm can be red shifted by 92 pm when the electric voltage is raised from -100 V to 100 V. The microresonators with the tuning range spanning over a full FSR are fabricated using photolithography assisted chemo-mechanical etching.

Zhe Wang, Chaohua Wu, Zhiwei Fang, Min Wang, Jintian Lin, Rongbo Wu, Jianhao Zhang, Jianping Yu, Miao Wu, Wei Chu, Tao Lu, Gang Chen, Ya Cheng. High-quality-factor optical microresonators fabricated on lithium niobate thin film with an electro-optical tuning range spanning over one free spectral range [Invited][J]. Chinese Optics Letters, 2021, 19(6): 060002.

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