Chinese Optics Letters, 2021, 19(6): , 网络出版: 2021-04-07

High-<i>Q</i> lithium niobate microring resonators using lift-off metallic masks

作者单位

City University of Hong Kong

摘要
High-<i>Q</i> lithium niobate (LN) optical micro-resonators are excellent platform for future applications in optical communications, nonlinear optics and quantum optics. To date, high <i>Q</i> factors are typically achieved in LN using either dielectric masks or femtosecond laser ablation, while the more standard and commonly available lift-off metallic masks are often believed to lead to rough sidewalls and lowered <i>Q</i> factors. Here we show that LN microring resonators with strong light confinement and intrinsic <i>Q</i> factors over 1 million can be fabricated using optimized lift-off metallic masks and dry etching processes, corresponding to a waveguide propagation loss of ~ 0.3 dB/cm. The entire process is fully compatible with wafer-scale production and could be transferred to other photonic materials.
Chinese Optics Letters, 2021, 19(6): , 网络出版: 2021-04-07

High-<i>Q</i> lithium niobate microring resonators using lift-off metallic masks

作者单位

City University of Hong Kong

引文
zhang ke, CHEN Zhaoxi, FENG ke, Wong W.H, Yue Bun Pun Edwin, Wang Cheng. High-<i>Q</i> lithium niobate microring resonators using lift-off metallic masks[J]. Chinese Optics Letters, 2021, 19(6):
Chinese Optics Letters, 2021, 19(6): , 网络出版: 2021-04-07

High-<i>Q</i> lithium niobate microring resonators using lift-off metallic masks

作者单位

City University of Hong Kong

基本信息
DOI: COL-0162
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