Chinese Optics Letters, 2021, 19 (6): 060010, Published Online: May. 13, 2021  

High-Q lithium niobate microring resonators using lift-off metallic masks [Invited] Download: 919次

Author Affiliations
1 Department of Electrical Engineering, City University of Hong Kong, Kowloon, Hong Kong, China
2 State Key Laboratory of Terahertz and Millimeter Waves, City University of Hong Kong, Kowloon, Hong Kong, China
Abstract
High-Q lithium niobate (LN) optical micro-resonators are an excellent platform for future applications in optical communications, nonlinear optics, and quantum optics. To date, high-Q factors are typically achieved in LN using either dielectric masks or femtosecond laser ablation, while the more standard and commonly available lift-off metallic masks are often believed to lead to rough sidewalls and lowered Q factors. Here, we show that LN microring resonators with strong light confinement and intrinsic Q factors over 1 million can be fabricated using optimized lift-off metallic masks and dry etching processes, corresponding to a waveguide propagation loss of 0.3 dB/cm. The entire process is fully compatible with wafer-scale production and could be transferred to other photonic materials.

Ke Zhang, Zhaoxi Chen, Hanke Feng, Wing-Han Wong, Edwin Yue-Bun Pun, Cheng Wang. High-Q lithium niobate microring resonators using lift-off metallic masks [Invited][J]. Chinese Optics Letters, 2021, 19(6): 060010.

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