针对传统阴影叠栅轮廓术深度测量范围有限的问题, 根据阴影叠栅条纹对比度的变化特点, 提出了大深度范围内的阴影叠栅轮廓新型测量方法。该方法将光栅置于不同的高度, 在物体表面形成叠栅条纹, 通过将不同高度范围内的条纹相位测量结果相互融合, 实现了大深度范围内的阴影叠栅轮廓测量。分析了光栅处于不同位置时叠栅条纹的相位分布特点, 提出了基于重叠区域的相位融合方法和误差补偿方法。通过实验验证了所提出方法的可行性和准确性。

The depth measuring range is limited by conventional shadow moiré profilometry. In order to solve the problem, a new method of shadow moiré profilometry, which can increase the depth measuring range, is proposed according to the fringe contrast characteristic of shadow moiré. When the grating is placed at different depths, moiré fringes will be formed on the surface. The shadow moiré profilometry with large depth measurement range is realized by merging the fringe phase measurement results of different depth ranges. The phase distributions of moiré fringes at different depths are analyzed. Methods for phase merging and error compensation are proposed based on the overlapping region. The feasibility and veracity of the proposed method are verified by experiments.